Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks
Optically black anti-reflective coatings that absorb light are potentially useful for color isolation in the flat panel display industries and stray light reduction in imaging technologies. Here we report the design and fabrication of high performance multilayered black anti-reflective coatings. Thi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2019-12-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379719317851 |
| _version_ | 1818506843788410880 |
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| author | Adam E. Shimabukuro Akihiro Ishii Hitoshi Takamura Fumio S. Ohuchi |
| author_facet | Adam E. Shimabukuro Akihiro Ishii Hitoshi Takamura Fumio S. Ohuchi |
| author_sort | Adam E. Shimabukuro |
| collection | DOAJ |
| description | Optically black anti-reflective coatings that absorb light are potentially useful for color isolation in the flat panel display industries and stray light reduction in imaging technologies. Here we report the design and fabrication of high performance multilayered black anti-reflective coatings. Thin film suboxides NbxTi1−xO2, NbO2 and TiO2−x were prepared using pulsed laser deposition (PLD). Their optical constants were then used to design a six layer coating which has less than 2% reflectivity across the visible range (400–700 nm) even at moderate incidence angles. Furthermore, this six layer coating displays large and constant absorbance across the visible range making it optically black. This optical behavior is due largely to the use of the suboxide NbxTi1−xO2 which is unique because of its spectrally constant absorption coefficient. Keywords: Pulsed laser deposition, Anti-reflective coating, Suboxide, Absorbing coating |
| first_indexed | 2024-12-10T22:10:12Z |
| format | Article |
| id | doaj.art-eec7d9786f73466ba080ee21c44a35b5 |
| institution | Directory Open Access Journal |
| issn | 2211-3797 |
| language | English |
| last_indexed | 2024-12-10T22:10:12Z |
| publishDate | 2019-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Results in Physics |
| spelling | doaj.art-eec7d9786f73466ba080ee21c44a35b52022-12-22T01:31:38ZengElsevierResults in Physics2211-37972019-12-0115Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacksAdam E. Shimabukuro0Akihiro Ishii1Hitoshi Takamura2Fumio S. Ohuchi3Department of Materials Science and Engineering, College of Engineering, University of Washington, Seattle 98195, USA; Corresponding author.Department of Materials Science, Graduate School of Engineering, Tohoku University, Sendai 980-8579, JapanDepartment of Materials Science, Graduate School of Engineering, Tohoku University, Sendai 980-8579, JapanDepartment of Materials Science and Engineering, College of Engineering, University of Washington, Seattle 98195, USAOptically black anti-reflective coatings that absorb light are potentially useful for color isolation in the flat panel display industries and stray light reduction in imaging technologies. Here we report the design and fabrication of high performance multilayered black anti-reflective coatings. Thin film suboxides NbxTi1−xO2, NbO2 and TiO2−x were prepared using pulsed laser deposition (PLD). Their optical constants were then used to design a six layer coating which has less than 2% reflectivity across the visible range (400–700 nm) even at moderate incidence angles. Furthermore, this six layer coating displays large and constant absorbance across the visible range making it optically black. This optical behavior is due largely to the use of the suboxide NbxTi1−xO2 which is unique because of its spectrally constant absorption coefficient. Keywords: Pulsed laser deposition, Anti-reflective coating, Suboxide, Absorbing coatinghttp://www.sciencedirect.com/science/article/pii/S2211379719317851 |
| spellingShingle | Adam E. Shimabukuro Akihiro Ishii Hitoshi Takamura Fumio S. Ohuchi Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks Results in Physics |
| title | Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks |
| title_full | Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks |
| title_fullStr | Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks |
| title_full_unstemmed | Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks |
| title_short | Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks |
| title_sort | fabrication of absorbing nb ti suboxide anti reflective thin film stacks |
| url | http://www.sciencedirect.com/science/article/pii/S2211379719317851 |
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