Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures
In this review, we present the recent progress on film metrology focused on the advanced and novel technologies during the last two decades. This review consists of various technologies and their measurement schemes to provide the inspiration for understanding each of the measurement principles and...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-07-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/7/1074 |
| _version_ | 1797445172035846144 |
|---|---|
| author | Ki-Nam Joo Hyo-Mi Park |
| author_facet | Ki-Nam Joo Hyo-Mi Park |
| author_sort | Ki-Nam Joo |
| collection | DOAJ |
| description | In this review, we present the recent progress on film metrology focused on the advanced and novel technologies during the last two decades. This review consists of various technologies and their measurement schemes to provide the inspiration for understanding each of the measurement principles and applications. In the technology and analysis section, several optical techniques used in film metrology are introduced and described with their benefits and limitations. The temporal, spatial and snapshot measurement schemes of optical film metrology are introduced in the measurement scheme section, and finally, the prospect on optical film metrology will be provided and discussed with the technology trend. |
| first_indexed | 2024-03-09T13:21:54Z |
| format | Article |
| id | doaj.art-eedb3c3992134d82b462f29215ec718e |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T13:21:54Z |
| publishDate | 2022-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-eedb3c3992134d82b462f29215ec718e2023-11-30T21:29:17ZengMDPI AGMicromachines2072-666X2022-07-01137107410.3390/mi13071074Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film StructuresKi-Nam Joo0Hyo-Mi Park13D Optical Metrology Laboratory, Department of Photonic Engineering, Chosun University, 309 Pilmun-daero, Dong-gu, Gwangju 61452, Korea3D Optical Metrology Laboratory, Department of Photonic Engineering, Chosun University, 309 Pilmun-daero, Dong-gu, Gwangju 61452, KoreaIn this review, we present the recent progress on film metrology focused on the advanced and novel technologies during the last two decades. This review consists of various technologies and their measurement schemes to provide the inspiration for understanding each of the measurement principles and applications. In the technology and analysis section, several optical techniques used in film metrology are introduced and described with their benefits and limitations. The temporal, spatial and snapshot measurement schemes of optical film metrology are introduced in the measurement scheme section, and finally, the prospect on optical film metrology will be provided and discussed with the technology trend.https://www.mdpi.com/2072-666X/13/7/1074film metrologytomographic measurementellipsometryreflectometryinterferometryconfocal microscopy |
| spellingShingle | Ki-Nam Joo Hyo-Mi Park Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures Micromachines film metrology tomographic measurement ellipsometry reflectometry interferometry confocal microscopy |
| title | Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures |
| title_full | Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures |
| title_fullStr | Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures |
| title_full_unstemmed | Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures |
| title_short | Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures |
| title_sort | recent progress on optical tomographic technology for measurements and inspections of film structures |
| topic | film metrology tomographic measurement ellipsometry reflectometry interferometry confocal microscopy |
| url | https://www.mdpi.com/2072-666X/13/7/1074 |
| work_keys_str_mv | AT kinamjoo recentprogressonopticaltomographictechnologyformeasurementsandinspectionsoffilmstructures AT hyomipark recentprogressonopticaltomographictechnologyformeasurementsandinspectionsoffilmstructures |