The Development of 3D Atomic Force Microscopy with Magnetically Driven-Orthogonal Cantilever Probes
This paper presents a three-dimensional (3D)-atomic force microscopy (AFM) method based on magnetically driven (MD)-orthogonal cantilever probes (OCPs), in which two independent scanners with three degrees of freedom are used to achieve the vector tracking of a sample surface with a controllable ang...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-05-01
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| Series: | Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2095809922004945 |