Thermodynamical consideration of the synthesis of solid AlN from thermal plasma
The synthesis process of solid AlN in thermal plasmas was investigated theoretically by computing the equilibrium composition of the gas mixture involving nitrogen and various amounts of aluminum, oxygen and hydrogen for the temperature range between 1000 and 5500 K. The results obtained by...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Serbian Chemical Society
2001-01-01
|
| Series: | Journal of the Serbian Chemical Society |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/0352-5139/2001/0352-51390108523R.pdf |
| Summary: | The synthesis process of solid AlN in thermal plasmas was investigated
theoretically by computing the equilibrium composition of the gas mixture
involving nitrogen and various amounts of aluminum, oxygen and hydrogen for
the temperature range between 1000 and 5500 K. The results obtained by
treating the plasma as a single-gas system were combined with those which
take into account the presence of solid AlN and liquid Al, to find the
optimal conditions for the deposition of solid AlN. The factors determining
the efficiency of this process are discussed. |
|---|---|
| ISSN: | 0352-5139 1820-7421 |