High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO<sub>3</sub> Single-Crystal Cantilever Beams

High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO<sub>3</sub> Single-Crystal Cantilever Beams

It is a great challenge to detect in-situ high-frequency vibration signals for extreme environment applications. A highly sensitive and robust vibration sensor is desired. Among the many piezoelectric materials, single-crystal lithium niobate (LiNbO<sub>3</sub>) could be a good candidate...

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Bibliographic Details
Main Authors: Huifen Wei, Wenping Geng, Kaixi Bi, Tao Li, Xiangmeng Li, Xiaojun Qiao, Yikun Shi, Huiyi Zhang, Caiqin Zhao, Gang Xue, Xiujian Chou
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Micromachines
Subjects:
MEMS
vibration sensor
four-cantilever beam
single-crystal LiNbO<sub>3</sub>
output charge sensitivity
temperature dependence
Online Access:https://www.mdpi.com/2072-666X/13/2/329

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