A self-consistent hybrid model connects empirical and optical models for fast, non-destructive inline characterization of thin, porous silicon layers

A self-consistent hybrid model connects empirical and optical models for fast, non-destructive inline characterization of thin, porous silicon layers

Epitaxially-grown wafers on top of sintered porous silicon are a material-efficient wafer production process, that is now being launched into mass production. This production process makes the material-expensive sawing procedure obsolete since the wafer can be easily detached from its seed substrate...

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Bibliographic Details
Main Authors: Wörnhör Alexandra, Demant Matthias, Vahlman Henri, Rein Stefan
Format: Article
Language:English
Published: EDP Sciences 2023-01-01
Series:EPJ Photovoltaics
Subjects:
hybrid model
self-consistent
porous silicon
thin films
reflectometry
Online Access:https://www.epj-pv.org/articles/epjpv/full_html/2023/01/pv220053/pv220053.html

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