High-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuator

In recent years, many types of inchworm mechanisms have been developed as miniature linear actuators for high-resolution positioning. The mechanism can usually move over a long distance regardless of the positioning actuator stroke because it moves like an inchworm by sequentially driving two clampi...

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Main Authors: Takaaki OIWA, Kyotaro AOYAMA, Junichi ASAMA
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2022-06-01
Series:Nihon Kikai Gakkai ronbunshu
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/transjsme/88/911/88_22-00040/_pdf/-char/en
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author Takaaki OIWA
Kyotaro AOYAMA
Junichi ASAMA
author_facet Takaaki OIWA
Kyotaro AOYAMA
Junichi ASAMA
author_sort Takaaki OIWA
collection DOAJ
description In recent years, many types of inchworm mechanisms have been developed as miniature linear actuators for high-resolution positioning. The mechanism can usually move over a long distance regardless of the positioning actuator stroke because it moves like an inchworm by sequentially driving two clamping elements and one positioning actuator. However, most mechanisms equipped with a multi-layered piezoelectric actuator for positioning have difficulty to improve their feed rate because of a small stroke of the actuator, despite their excellent positioning resolution. An inchworm mechanism in this study employs one electromagnet for longitudinally driving a moving bar and two electromagnets for clamping the bar. Use of the electromagnet with a larger stroke enables a high-speed feed rate and allows for the use of inexpensive low-voltage amplifiers. Furthermore, a displacement reducer based on the toggle linkage reduces the actuator displacement and enlarges the thrust force. Since the output displacement of the reducer exponentially increases with an increase in the input displacement, this mechanism achieves not only high-speed positioning but also high-resolution positioning as necessary. This paper describes the principle of proposed mechanism and the design of the electromagnet actuator and clamps. Experiments of a prototype mechanism showed that low reduction ratio of the reducer achieved maximum feed rate of 25 mm/s at a driving frequency of 110 Hz. In addition, high reduction ratio kept the positioning resolution less than 50 nm.
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spelling doaj.art-f04bc3e9373146cca74f0a1e6bdad70b2022-12-22T03:39:11ZjpnThe Japan Society of Mechanical EngineersNihon Kikai Gakkai ronbunshu2187-97612022-06-018891122-0004022-0004010.1299/transjsme.22-00040transjsmeHigh-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuatorTakaaki OIWA0Kyotaro AOYAMA1Junichi ASAMA2Department of Mechanical Engineering, Shizuoka UniversityGraduate School of Integrated Science and Technology, Shizuoka UniversityDepartment of Mechanical Engineering, Shizuoka UniversityIn recent years, many types of inchworm mechanisms have been developed as miniature linear actuators for high-resolution positioning. The mechanism can usually move over a long distance regardless of the positioning actuator stroke because it moves like an inchworm by sequentially driving two clamping elements and one positioning actuator. However, most mechanisms equipped with a multi-layered piezoelectric actuator for positioning have difficulty to improve their feed rate because of a small stroke of the actuator, despite their excellent positioning resolution. An inchworm mechanism in this study employs one electromagnet for longitudinally driving a moving bar and two electromagnets for clamping the bar. Use of the electromagnet with a larger stroke enables a high-speed feed rate and allows for the use of inexpensive low-voltage amplifiers. Furthermore, a displacement reducer based on the toggle linkage reduces the actuator displacement and enlarges the thrust force. Since the output displacement of the reducer exponentially increases with an increase in the input displacement, this mechanism achieves not only high-speed positioning but also high-resolution positioning as necessary. This paper describes the principle of proposed mechanism and the design of the electromagnet actuator and clamps. Experiments of a prototype mechanism showed that low reduction ratio of the reducer achieved maximum feed rate of 25 mm/s at a driving frequency of 110 Hz. In addition, high reduction ratio kept the positioning resolution less than 50 nm.https://www.jstage.jst.go.jp/article/transjsme/88/911/88_22-00040/_pdf/-char/eninchworm mechanismmicrostepperelectromagnetic actuatorparallel spring flexurehigh speed positioningdisplacement reducertoggle linkage
spellingShingle Takaaki OIWA
Kyotaro AOYAMA
Junichi ASAMA
High-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuator
Nihon Kikai Gakkai ronbunshu
inchworm mechanism
microstepper
electromagnetic actuator
parallel spring flexure
high speed positioning
displacement reducer
toggle linkage
title High-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuator
title_full High-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuator
title_fullStr High-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuator
title_full_unstemmed High-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuator
title_short High-speed high-resolution inchworm based on displacement reducer driven by electromagnetic actuator
title_sort high speed high resolution inchworm based on displacement reducer driven by electromagnetic actuator
topic inchworm mechanism
microstepper
electromagnetic actuator
parallel spring flexure
high speed positioning
displacement reducer
toggle linkage
url https://www.jstage.jst.go.jp/article/transjsme/88/911/88_22-00040/_pdf/-char/en
work_keys_str_mv AT takaakioiwa highspeedhighresolutioninchwormbasedondisplacementreducerdrivenbyelectromagneticactuator
AT kyotaroaoyama highspeedhighresolutioninchwormbasedondisplacementreducerdrivenbyelectromagneticactuator
AT junichiasama highspeedhighresolutioninchwormbasedondisplacementreducerdrivenbyelectromagneticactuator