The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization
Microlens arrays (MLAs) are key optical components in laser beam homogenization. However, due to imperfect surface profiles resulting from microfabrication, the functionalities of MLAs in beam modulation could be compromised to some extent. In order to address this issue, the effects of surface prof...
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| Format: | Article |
| Language: | English |
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MDPI AG
2017-02-01
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| Series: | Micromachines |
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| Online Access: | http://www.mdpi.com/2072-666X/8/2/50 |
| _version_ | 1818470131400966144 |
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| author | Qiling Deng Axiu Cao Song Hu Hui Pang Jiazhou Wang Man Zhang Jian Chen Lifang Shi Qiling Deng Song Hu |
| author_facet | Qiling Deng Axiu Cao Song Hu Hui Pang Jiazhou Wang Man Zhang Jian Chen Lifang Shi Qiling Deng Song Hu |
| author_sort | Qiling Deng |
| collection | DOAJ |
| description | Microlens arrays (MLAs) are key optical components in laser beam homogenization. However, due to imperfect surface profiles resulting from microfabrication, the functionalities of MLAs in beam modulation could be compromised to some extent. In order to address this issue, the effects of surface profile mismatches between ideal and fabricated MLAs on beam homogenization were analyzed. Four types of surface profile errors of MLAs were modeled theoretically and numerical simulations were conducted to quantitatively estimate the effects of these profile errors on beam homogenization. In addition, experiments were conducted to validate the simulation results, revealing that profile errors leading to optical deviations located on the apex of microlenses affected beam homogenization less than deviations located further away from it. This study can provide references for the further applications of MLAs in beam homogenization. |
| first_indexed | 2024-04-13T21:33:51Z |
| format | Article |
| id | doaj.art-f06b0b0c6b3240b794d42c0a5af563c4 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-04-13T21:33:51Z |
| publishDate | 2017-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-f06b0b0c6b3240b794d42c0a5af563c42022-12-22T02:29:04ZengMDPI AGMicromachines2072-666X2017-02-01825010.3390/mi8020050mi8020050The Effects of Profile Errors of Microlens Surfaces on Laser Beam HomogenizationQiling Deng0Axiu Cao1Song Hu2Hui Pang3Jiazhou Wang4Man Zhang5Jian Chen6Lifang Shi7Qiling Deng8Song Hu9Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaMicrolens arrays (MLAs) are key optical components in laser beam homogenization. However, due to imperfect surface profiles resulting from microfabrication, the functionalities of MLAs in beam modulation could be compromised to some extent. In order to address this issue, the effects of surface profile mismatches between ideal and fabricated MLAs on beam homogenization were analyzed. Four types of surface profile errors of MLAs were modeled theoretically and numerical simulations were conducted to quantitatively estimate the effects of these profile errors on beam homogenization. In addition, experiments were conducted to validate the simulation results, revealing that profile errors leading to optical deviations located on the apex of microlenses affected beam homogenization less than deviations located further away from it. This study can provide references for the further applications of MLAs in beam homogenization.http://www.mdpi.com/2072-666X/8/2/50microlens arraybeam homogenizationsurface profile errormicrofabrication |
| spellingShingle | Qiling Deng Axiu Cao Song Hu Hui Pang Jiazhou Wang Man Zhang Jian Chen Lifang Shi Qiling Deng Song Hu The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization Micromachines microlens array beam homogenization surface profile error microfabrication |
| title | The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization |
| title_full | The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization |
| title_fullStr | The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization |
| title_full_unstemmed | The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization |
| title_short | The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization |
| title_sort | effects of profile errors of microlens surfaces on laser beam homogenization |
| topic | microlens array beam homogenization surface profile error microfabrication |
| url | http://www.mdpi.com/2072-666X/8/2/50 |
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