Cratering Induced by Slow Highly Charged Ions on Ultrathin PMMA Films
Highly charged ions are a well-known tool for the nanostructuring of surfaces. We report on the thickness dependence of nanostructures produced by single 260 keV Xe<sup>38+</sup> ions on ultrathin poly(methyl methacrylate) (PMMA) films (1 nm to 60 nm) deposited onto Si substrates. The na...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-09-01
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| Series: | Atoms |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2218-2004/10/4/96 |