Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using volatile organic and organometallic precursors....

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Bibliographic Details
Main Authors:	Ivo Utke, Johann Michler, Robert Winkler, Harald Plank
Format:	Article
Language:	English
Published:	MDPI AG 2020-04-01
Series:	Micromachines
Subjects:	nanoscale additive manufacturing gas-assisted electron and ion-induced deposition focused electron beam-induced deposition (FEBID) focused ion beam-induced deposition (FIBID) mechanical properties Young’s modulus
Online Access:	https://www.mdpi.com/2072-666X/11/4/397

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