Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing
This paper presents a comprehensive modeling and experimental verification of active piezoresistive atomic force microscopy (AFM) cantilevers, which are the technology enabling high-resolution and high-speed surface measurements. The mechanical structure of the cantilevers integrating Wheatstone pie...
Main Authors: | Piotr Kunicki, Tihomir Angelov, Tzvetan Ivanov, Teodor Gotszalk, Ivo Rangelow |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-10-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/19/20/4429 |
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