Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2019-10-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.9b02441 |
| _version_ | 1818571309672562688 |
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| author | Hsu-Sheng Tsai Fan-Wei Liu Jhe-Wei Liou Chong-Chi Chi Shin-Yi Tang Changan Wang Hao Ouyang Yu-Lun Chueh Chaoming Liu Shengqiang Zhou Wei-Yen Woon |
| author_facet | Hsu-Sheng Tsai Fan-Wei Liu Jhe-Wei Liou Chong-Chi Chi Shin-Yi Tang Changan Wang Hao Ouyang Yu-Lun Chueh Chaoming Liu Shengqiang Zhou Wei-Yen Woon |
| author_sort | Hsu-Sheng Tsai |
| collection | DOAJ |
| first_indexed | 2024-12-14T13:54:01Z |
| format | Article |
| id | doaj.art-f1ace57e10854ed49ad886aebef7dda0 |
| institution | Directory Open Access Journal |
| issn | 2470-1343 |
| language | English |
| last_indexed | 2024-12-14T13:54:01Z |
| publishDate | 2019-10-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj.art-f1ace57e10854ed49ad886aebef7dda02022-12-21T22:58:54ZengAmerican Chemical SocietyACS Omega2470-13432019-10-01417175361754110.1021/acsomega.9b02441Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam TechnologyHsu-Sheng Tsai0Fan-Wei Liu1Jhe-Wei Liou2Chong-Chi Chi3Shin-Yi Tang4Changan Wang5Hao Ouyang6Yu-Lun Chueh7Chaoming Liu8Shengqiang Zhou9Wei-Yen Woon10Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, GermanyDepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.Department of Physics, National Central University, Taoyuan, Taiwan, R. O. C.Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, GermanyDepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, GermanyInstitute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, GermanyDepartment of Physics, National Central University, Taoyuan, Taiwan, R. O. C.https://doi.org/10.1021/acsomega.9b02441 |
| spellingShingle | Hsu-Sheng Tsai Fan-Wei Liu Jhe-Wei Liou Chong-Chi Chi Shin-Yi Tang Changan Wang Hao Ouyang Yu-Lun Chueh Chaoming Liu Shengqiang Zhou Wei-Yen Woon Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology ACS Omega |
| title | Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology |
| title_full | Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology |
| title_fullStr | Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology |
| title_full_unstemmed | Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology |
| title_short | Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology |
| title_sort | direct synthesis of large scale multilayer tase2 on sio2 si using ion beam technology |
| url | https://doi.org/10.1021/acsomega.9b02441 |
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