Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology

Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology

Bibliographic Details
Main Authors:	Hsu-Sheng Tsai, Fan-Wei Liu, Jhe-Wei Liou, Chong-Chi Chi, Shin-Yi Tang, Changan Wang, Hao Ouyang, Yu-Lun Chueh, Chaoming Liu, Shengqiang Zhou, Wei-Yen Woon
Format:	Article
Language:	English
Published:	American Chemical Society 2019-10-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.9b02441

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