A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications
Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mech...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/11/5087 |
| _version_ | 1797596803989766144 |
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| author | Lungtai Chen Chinsheng Chang Liangju Chien Borshiun Lee Wenlo Shieh |
| author_facet | Lungtai Chen Chinsheng Chang Liangju Chien Borshiun Lee Wenlo Shieh |
| author_sort | Lungtai Chen |
| collection | DOAJ |
| description | Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mechanism to embed a hydrophobic polytetrafluoroethylene (PTFE) filter into the upper cover of the gas sensor packaging. This approach is distinct from the current method of external pasting. The proposed packaging mechanism is successfully demonstrated in this study. The test results indicate that the innovative packaging with the PTFE filter reduced the average response value of the sensor to the humidity range of 75~95% RH by 60.6% compared to the packaging without the PTFE filter. Additionally, the packaging passed the High-Accelerated Temperature and Humidity Stress (HAST) reliability test. With a similar sensing mechanism, the proposed packaging embedded with a PTFE filter can be further employed for the application of exhalation-related, such as coronavirus disease 2019 (COVID-19), breath screening. |
| first_indexed | 2024-03-11T02:58:11Z |
| format | Article |
| id | doaj.art-f1ccf2d1de9a4798b1a4f184e4ebc730 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T02:58:11Z |
| publishDate | 2023-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-f1ccf2d1de9a4798b1a4f184e4ebc7302023-11-18T08:32:22ZengMDPI AGSensors1424-82202023-05-012311508710.3390/s23115087A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling ApplicationsLungtai Chen0Chinsheng Chang1Liangju Chien2Borshiun Lee3Wenlo Shieh4Smart Sensing and Systems Technology Center, Industrial Technology & Research Institute, Tainan 70955, TaiwanSmart Sensing and Systems Technology Center, Industrial Technology & Research Institute, Tainan 70955, TaiwanSmart Sensing and Systems Technology Center, Industrial Technology & Research Institute, Tainan 70955, TaiwanSmart Sensing and Systems Technology Center, Industrial Technology & Research Institute, Tainan 70955, TaiwanAvantpac Technology Corporation, Kaohsiung 80673, TaiwanDust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mechanism to embed a hydrophobic polytetrafluoroethylene (PTFE) filter into the upper cover of the gas sensor packaging. This approach is distinct from the current method of external pasting. The proposed packaging mechanism is successfully demonstrated in this study. The test results indicate that the innovative packaging with the PTFE filter reduced the average response value of the sensor to the humidity range of 75~95% RH by 60.6% compared to the packaging without the PTFE filter. Additionally, the packaging passed the High-Accelerated Temperature and Humidity Stress (HAST) reliability test. With a similar sensing mechanism, the proposed packaging embedded with a PTFE filter can be further employed for the application of exhalation-related, such as coronavirus disease 2019 (COVID-19), breath screening.https://www.mdpi.com/1424-8220/23/11/5087MEMS gas sensorsCOVID-19human exhale samplingharsh outdoorpackagingPTFE filter |
| spellingShingle | Lungtai Chen Chinsheng Chang Liangju Chien Borshiun Lee Wenlo Shieh A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications Sensors MEMS gas sensors COVID-19 human exhale sampling harsh outdoor packaging PTFE filter |
| title | A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications |
| title_full | A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications |
| title_fullStr | A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications |
| title_full_unstemmed | A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications |
| title_short | A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications |
| title_sort | novel packaging of the mems gas sensors used for harsh outdoor and human exhale sampling applications |
| topic | MEMS gas sensors COVID-19 human exhale sampling harsh outdoor packaging PTFE filter |
| url | https://www.mdpi.com/1424-8220/23/11/5087 |
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