A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications
Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mech...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/11/5087 |