Measurement of nanopatterned surfaces by real and reciprocal space techniques

Measurement of nanopatterned surfaces by real and reciprocal space techniques

Bibliographic Details
Main Authors:	Siffalovic P., Vegso K., Jergel M., Majkova E., Keckes J., Maier G., Cornejo M., Ziberi B., Frost F., Hasse B., Wiesmann J.
Format:	Article
Language:	English
Published:	Sciendo 2010-01-01
Series:	Measurement Science Review
Subjects:	afm gisaxs nanostructures ion-beam sputtering
Online Access:	https://doi.org/10.2478/v10048-010-0027-1

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