Influence of ZnO Film Deposition Parameters on Piezoelectric Properties and Film-to-Substrate Adhesion on a GH4169 Superalloy Steel Substrate

Influence of ZnO Film Deposition Parameters on Piezoelectric Properties and Film-to-Substrate Adhesion on a GH4169 Superalloy Steel Substrate

ZnO film is widely used in the field of health monitoring sensors, which has high requirements for the piezoelectric coefficient and film-to-substrate adhesion of the ZnO film. In this study, ZnO thin films were grown on a GH4169 superalloy steel (GSS) substrate using magnetron sputtering, and the e...

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Bibliographic Details
Main Authors: Guowei Mo, Yunxian Cui, Junwei Yin, Pengfei Gao
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
ZnO piezoelectric films
GSS substrates
deposition process parameters
crystal quality
magnetron sputtering
Online Access:https://www.mdpi.com/2072-666X/13/4/639

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