Optimization of Urea-EnFET Based on Ta2O5 Layer with Post Annealing
In this study, the urea-enzymatic field effect transistors (EnFETs) were investigated based on pH-ion sensitive field effect transistors (ISFETs) with tantalum pentoxide (Ta2O5) sensing membranes. In addition, a post N2 annealing was used to improve the sensing properties. At first, the pH sensitivi...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2011-04-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/11/5/4562/ |