Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated device...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/1028 |
| _version_ | 1811310637975863296 |
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| author | Eurico Esteves Moreira João Gaspar Luis Alexandre Rocha |
| author_facet | Eurico Esteves Moreira João Gaspar Luis Alexandre Rocha |
| author_sort | Eurico Esteves Moreira |
| collection | DOAJ |
| description | A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA. |
| first_indexed | 2024-04-13T10:02:24Z |
| format | Article |
| id | doaj.art-f2783ea3b34d4deb8dcbfc254cfa2d71 |
| institution | Directory Open Access Journal |
| issn | 2504-3900 |
| language | English |
| last_indexed | 2024-04-13T10:02:24Z |
| publishDate | 2018-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj.art-f2783ea3b34d4deb8dcbfc254cfa2d712022-12-22T02:51:12ZengMDPI AGProceedings2504-39002018-11-01213102810.3390/proceedings2131028proceedings2131028Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork ResonatorEurico Esteves Moreira0João Gaspar1Luis Alexandre Rocha2CMEMS-UM, University of Minho, 4800-058 Guimarães, PortugalMeN, International and Iberian Nanotechnology Laboratory (INL), 4717-330 Braga, PortugalCMEMS-UM, University of Minho, 4800-058 Guimarães, PortugalA Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.https://www.mdpi.com/2504-3900/2/13/1028MEMSmagnetometerfrequency modulatedLorentz force |
| spellingShingle | Eurico Esteves Moreira João Gaspar Luis Alexandre Rocha Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator Proceedings MEMS magnetometer frequency modulated Lorentz force |
| title | Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator |
| title_full | Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator |
| title_fullStr | Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator |
| title_full_unstemmed | Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator |
| title_short | Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator |
| title_sort | frequency modulated magnetometer using a double ended tuning fork resonator |
| topic | MEMS magnetometer frequency modulated Lorentz force |
| url | https://www.mdpi.com/2504-3900/2/13/1028 |
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