Simulation of the motion of poly-atoms in the early stage of the film growth(薄膜生长初期多原子移动影响的模拟)
模拟了在低温底上沉积单层薄膜初期的表面形貌.提出了新的算法,实现了多个原子同时在沉积基底上移动的过程,克服了以往只能模拟基底上仅有一个运动原子的缺点,同时引入了沉积流量,并在此基础上讨论了移动步数、沉积流量等因素对生长的影响作用.模拟结果与实验相近,获得的花样具有分形特征....
| Main Authors: | , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Zhejiang University Press
2003-05-01
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| Series: | Zhejiang Daxue xuebao. Lixue ban |
| Subjects: | |
| Online Access: | https://doi.org/zjup/1008-9497.2003.30.3.274-276 |