Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2022-11-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.2c04037 |
| _version_ | 1811216543433883648 |
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| author | Lipei Peng Han Dong Shaobo Li Zhanwei Wang Xiangjun Meng Yafeng Wang Tengshi Liu Xiangyu Li Jialiang Ji |
| author_facet | Lipei Peng Han Dong Shaobo Li Zhanwei Wang Xiangjun Meng Yafeng Wang Tengshi Liu Xiangyu Li Jialiang Ji |
| author_sort | Lipei Peng |
| collection | DOAJ |
| first_indexed | 2024-04-12T06:40:55Z |
| format | Article |
| id | doaj.art-f3c5a5f701b245a2a82ded173148c391 |
| institution | Directory Open Access Journal |
| issn | 2470-1343 |
| language | English |
| last_indexed | 2024-04-12T06:40:55Z |
| publishDate | 2022-11-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj.art-f3c5a5f701b245a2a82ded173148c3912022-12-22T03:43:44ZengAmerican Chemical SocietyACS Omega2470-13432022-11-01746420444205510.1021/acsomega.2c04037Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD ReactorLipei Peng0Han Dong1Shaobo Li2Zhanwei Wang3Xiangjun Meng4Yafeng Wang5Tengshi Liu6Xiangyu Li7Jialiang Ji8School of Materials Science and Engineering, Shanghai University, Shanghai, ChinaSchool of Materials Science and Engineering, Shanghai University, Shanghai, ChinaPERIC Special Gas Co., Ltd, Handan City, Hebei Province, ChinaPERIC Special Gas Co., Ltd, Handan City, Hebei Province, ChinaPERIC Special Gas Co., Ltd, Handan City, Hebei Province, ChinaPERIC Special Gas Co., Ltd, Handan City, Hebei Province, ChinaPERIC Special Gas Co., Ltd, Handan City, Hebei Province, ChinaPERIC Special Gas Co., Ltd, Handan City, Hebei Province, ChinaPERIC Special Gas Co., Ltd, Handan City, Hebei Province, Chinahttps://doi.org/10.1021/acsomega.2c04037 |
| spellingShingle | Lipei Peng Han Dong Shaobo Li Zhanwei Wang Xiangjun Meng Yafeng Wang Tengshi Liu Xiangyu Li Jialiang Ji Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor ACS Omega |
| title | Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor |
| title_full | Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor |
| title_fullStr | Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor |
| title_full_unstemmed | Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor |
| title_short | Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor |
| title_sort | numerical simulation study on flow and heat transfer of the tungsten crucible cvd reactor |
| url | https://doi.org/10.1021/acsomega.2c04037 |
| work_keys_str_mv | AT lipeipeng numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT handong numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT shaoboli numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT zhanweiwang numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT xiangjunmeng numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT yafengwang numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT tengshiliu numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT xiangyuli numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor AT jialiangji numericalsimulationstudyonflowandheattransferofthetungstencruciblecvdreactor |