Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor

Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor

Bibliographic Details
Main Authors:	Lipei Peng, Han Dong, Shaobo Li, Zhanwei Wang, Xiangjun Meng, Yafeng Wang, Tengshi Liu, Xiangyu Li, Jialiang Ji
Format:	Article
Language:	English
Published:	American Chemical Society 2022-11-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.2c04037

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