Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure

In this study, an external light extraction layer with a micro-nano hybrid structure was applied to improve the external light extraction efficiency of organic light-emitting diodes (OLEDs). A reactive ion-etching (RIE) process, using O<sub>2</sub> and CHF<sub>3</sub> plasma,...

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Main Authors: Eun-Jeong Bae, Shin-Woo Kang, Geun-Su Choi, Eun-Bi Jang, Dong-Hyun Baek, Byeong-Kwon Ju, Young-Wook Park
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/8/1266
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author Eun-Jeong Bae
Shin-Woo Kang
Geun-Su Choi
Eun-Bi Jang
Dong-Hyun Baek
Byeong-Kwon Ju
Young-Wook Park
author_facet Eun-Jeong Bae
Shin-Woo Kang
Geun-Su Choi
Eun-Bi Jang
Dong-Hyun Baek
Byeong-Kwon Ju
Young-Wook Park
author_sort Eun-Jeong Bae
collection DOAJ
description In this study, an external light extraction layer with a micro-nano hybrid structure was applied to improve the external light extraction efficiency of organic light-emitting diodes (OLEDs). A reactive ion-etching (RIE) process, using O<sub>2</sub> and CHF<sub>3</sub> plasma, was performed on the surface of the micro-scale pattern to form micro-nano hybrid structures. According to the results of this study, the nanostructures formed by the treatment of O<sub>2</sub> and CHF<sub>3</sub> were different, and the efficiency according to the structures was analyzed experimentally and theoretically. As a result, the OLED, to which the micro-nano hybrid structure, manufactured through a simple process, is applied, improved the external light extraction efficiency by up to 38%, and an extended viewing angle profile was obtained. Additionally, an effective method for enhancing the out-coupling efficiency of OLEDs was presented by optimizing the micro-nano hybrid structure according to process conditions.
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spelling doaj.art-f3ff884a831549bc90fcfd5d163e0c592023-12-03T13:47:23ZengMDPI AGNanomaterials2079-49912022-04-01128126610.3390/nano12081266Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid StructureEun-Jeong Bae0Shin-Woo Kang1Geun-Su Choi2Eun-Bi Jang3Dong-Hyun Baek4Byeong-Kwon Ju5Young-Wook Park6Nano and Organic-Electronics Laboratory, Department of Display and Semiconductor Engineering, Sun Moon University, Asan 31460, KoreaNano and Organic-Electronics Laboratory, Department of Display and Semiconductor Engineering, Sun Moon University, Asan 31460, KoreaNano and Organic-Electronics Laboratory, Department of Display and Semiconductor Engineering, Sun Moon University, Asan 31460, KoreaNano and Organic-Electronics Laboratory, Department of Display and Semiconductor Engineering, Sun Moon University, Asan 31460, KoreaCenter for Next Generation Semiconductor Technology, Department of Display and Semiconductor Engineering, Sun Moon University, Asan 31460, KoreaDisplay and Nanosystem Laboratory, Department of Electrical Engineering, Korea University, Seoul 02841, KoreaNano and Organic-Electronics Laboratory, Department of Display and Semiconductor Engineering, Sun Moon University, Asan 31460, KoreaIn this study, an external light extraction layer with a micro-nano hybrid structure was applied to improve the external light extraction efficiency of organic light-emitting diodes (OLEDs). A reactive ion-etching (RIE) process, using O<sub>2</sub> and CHF<sub>3</sub> plasma, was performed on the surface of the micro-scale pattern to form micro-nano hybrid structures. According to the results of this study, the nanostructures formed by the treatment of O<sub>2</sub> and CHF<sub>3</sub> were different, and the efficiency according to the structures was analyzed experimentally and theoretically. As a result, the OLED, to which the micro-nano hybrid structure, manufactured through a simple process, is applied, improved the external light extraction efficiency by up to 38%, and an extended viewing angle profile was obtained. Additionally, an effective method for enhancing the out-coupling efficiency of OLEDs was presented by optimizing the micro-nano hybrid structure according to process conditions.https://www.mdpi.com/2079-4991/12/8/1266organic light-emitting diodeslight extractionreactive ion etchingmico-nano hybrid structure
spellingShingle Eun-Jeong Bae
Shin-Woo Kang
Geun-Su Choi
Eun-Bi Jang
Dong-Hyun Baek
Byeong-Kwon Ju
Young-Wook Park
Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure
Nanomaterials
organic light-emitting diodes
light extraction
reactive ion etching
mico-nano hybrid structure
title Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure
title_full Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure
title_fullStr Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure
title_full_unstemmed Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure
title_short Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure
title_sort enhanced light extraction from organic light emitting diodes with micro nano hybrid structure
topic organic light-emitting diodes
light extraction
reactive ion etching
mico-nano hybrid structure
url https://www.mdpi.com/2079-4991/12/8/1266
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AT eunbijang enhancedlightextractionfromorganiclightemittingdiodeswithmicronanohybridstructure
AT donghyunbaek enhancedlightextractionfromorganiclightemittingdiodeswithmicronanohybridstructure
AT byeongkwonju enhancedlightextractionfromorganiclightemittingdiodeswithmicronanohybridstructure
AT youngwookpark enhancedlightextractionfromorganiclightemittingdiodeswithmicronanohybridstructure