Magnesium Zirconate Titanate Thin Films Used as an NO<sub>2</sub> Sensing Layer for Gas Sensor Applications Developed Using a Sol–Gel Method

Magnesium Zirconate Titanate Thin Films Used as an NO<sub>2</sub> Sensing Layer for Gas Sensor Applications Developed Using a Sol–Gel Method

Magnesium zirconate titanate (MZT) thin films, used as a sensing layer on Al interdigitated electrodes prepared using a sol–gel spin-coating method, are demonstrated in this study. The p-type MZT/Al/SiO<sub>2</sub>/Si structure for sensing NO<sub>2</sub> is also discussed. Th...

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Bibliographic Details
Main Authors: Pei-Shan Huang, Ke-Jing Lee, Yeong-Her Wang
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Sensors
Subjects:
gas sensor
magnesium zirconia titanate
thin film
sol–gel method
nitrogen dioxide
Online Access:https://www.mdpi.com/1424-8220/21/8/2825

Internet

https://www.mdpi.com/1424-8220/21/8/2825

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