Magnesium Zirconate Titanate Thin Films Used as an NO<sub>2</sub> Sensing Layer for Gas Sensor Applications Developed Using a Sol–Gel Method
Magnesium zirconate titanate (MZT) thin films, used as a sensing layer on Al interdigitated electrodes prepared using a sol–gel spin-coating method, are demonstrated in this study. The p-type MZT/Al/SiO<sub>2</sub>/Si structure for sensing NO<sub>2</sub> is also discussed. Th...
Main Authors: | Pei-Shan Huang, Ke-Jing Lee, Yeong-Her Wang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-04-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/21/8/2825 |
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