Magnetostrictive Micro Mirrors for an Optical Switch Matrix
We have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of t...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2007-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/7/10/2174/ |
| _version_ | 1818001975139106816 |
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| author | Myeong-Woo Cho Chongdu Cho Heung-Shik Lee |
| author_facet | Myeong-Woo Cho Chongdu Cho Heung-Shik Lee |
| author_sort | Myeong-Woo Cho |
| collection | DOAJ |
| description | We have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of the mirror with the condition as: Argas pressure below 1.2×10-9 torr, DC input power of 180W and heating temperature of up to250°C for the wireless control of each component. Mirrors are actuated by externallyapplied magnetic fields for the micro application. Applied beam path can be changedaccording to the direction and the magnitude of applied magnetic field. Reflectivity changes,M-H curves and X-ray diffractions of sputtered mirrors are measured to determine magneto-optical, magneto-elastic properties with variation in sputtered film thickness. The deflectedangle-magnetic field characteristics of the fabricated mirror are measured. |
| first_indexed | 2024-04-14T03:41:00Z |
| format | Article |
| id | doaj.art-f4434159a85b418e85794faf169e657a |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-14T03:41:00Z |
| publishDate | 2007-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-f4434159a85b418e85794faf169e657a2022-12-22T02:14:33ZengMDPI AGSensors1424-82202007-10-017102174218210.3390/s7102174Magnetostrictive Micro Mirrors for an Optical Switch MatrixMyeong-Woo ChoChongdu ChoHeung-Shik LeeWe have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of the mirror with the condition as: Argas pressure below 1.2×10-9 torr, DC input power of 180W and heating temperature of up to250°C for the wireless control of each component. Mirrors are actuated by externallyapplied magnetic fields for the micro application. Applied beam path can be changedaccording to the direction and the magnitude of applied magnetic field. Reflectivity changes,M-H curves and X-ray diffractions of sputtered mirrors are measured to determine magneto-optical, magneto-elastic properties with variation in sputtered film thickness. The deflectedangle-magnetic field characteristics of the fabricated mirror are measured.http://www.mdpi.com/1424-8220/7/10/2174/Optical switchmagnetostrictive mirrorTbDyFemicromachining. |
| spellingShingle | Myeong-Woo Cho Chongdu Cho Heung-Shik Lee Magnetostrictive Micro Mirrors for an Optical Switch Matrix Sensors Optical switch magnetostrictive mirror TbDyFe micromachining. |
| title | Magnetostrictive Micro Mirrors for an Optical Switch Matrix |
| title_full | Magnetostrictive Micro Mirrors for an Optical Switch Matrix |
| title_fullStr | Magnetostrictive Micro Mirrors for an Optical Switch Matrix |
| title_full_unstemmed | Magnetostrictive Micro Mirrors for an Optical Switch Matrix |
| title_short | Magnetostrictive Micro Mirrors for an Optical Switch Matrix |
| title_sort | magnetostrictive micro mirrors for an optical switch matrix |
| topic | Optical switch magnetostrictive mirror TbDyFe micromachining. |
| url | http://www.mdpi.com/1424-8220/7/10/2174/ |
| work_keys_str_mv | AT myeongwoocho magnetostrictivemicromirrorsforanopticalswitchmatrix AT chongducho magnetostrictivemicromirrorsforanopticalswitchmatrix AT heungshiklee magnetostrictivemicromirrorsforanopticalswitchmatrix |