Review on the Modeling of Electrostatic MEMS
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduc...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2010-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/10/6/6149/ |
| _version_ | 1818037441712357376 |
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| author | Wan-Chun Chuang Hsin-Li Lee Pei-Zen Chang Yuh-Chung Hu |
| author_facet | Wan-Chun Chuang Hsin-Li Lee Pei-Zen Chang Yuh-Chung Hu |
| author_sort | Wan-Chun Chuang |
| collection | DOAJ |
| description | Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. |
| first_indexed | 2024-12-10T07:26:54Z |
| format | Article |
| id | doaj.art-f4d54604e912419d9bdaed3a223c354f |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-12-10T07:26:54Z |
| publishDate | 2010-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-f4d54604e912419d9bdaed3a223c354f2022-12-22T01:57:41ZengMDPI AGSensors1424-82202010-06-011066149617110.3390/s100606149Review on the Modeling of Electrostatic MEMSWan-Chun ChuangHsin-Li LeePei-Zen ChangYuh-Chung HuElectrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.http://www.mdpi.com/1424-8220/10/6/6149/electrostaticselectromechanicsMEMSpull-in voltage |
| spellingShingle | Wan-Chun Chuang Hsin-Li Lee Pei-Zen Chang Yuh-Chung Hu Review on the Modeling of Electrostatic MEMS Sensors electrostatics electromechanics MEMS pull-in voltage |
| title | Review on the Modeling of Electrostatic MEMS |
| title_full | Review on the Modeling of Electrostatic MEMS |
| title_fullStr | Review on the Modeling of Electrostatic MEMS |
| title_full_unstemmed | Review on the Modeling of Electrostatic MEMS |
| title_short | Review on the Modeling of Electrostatic MEMS |
| title_sort | review on the modeling of electrostatic mems |
| topic | electrostatics electromechanics MEMS pull-in voltage |
| url | http://www.mdpi.com/1424-8220/10/6/6149/ |
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