Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode
With the continuous development of wearable electronics, health care and smart terminals, highly performance flexible pressure sensors present a huge application prospect. In this study, by introducing the micro-array structured electrodes and dielectric layers with high dielectric constant, capacit...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-06-01
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| Series: | Journal of Materiomics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2352847819301418 |
| _version_ | 1827834454697050112 |
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| author | Longquan Ma Xuecheng Yu Yuanyuan Yang Yougen Hu Xinyu Zhang Huayuan Li Xing Ouyang Pengli Zhu Rong Sun Ching-ping Wong |
| author_facet | Longquan Ma Xuecheng Yu Yuanyuan Yang Yougen Hu Xinyu Zhang Huayuan Li Xing Ouyang Pengli Zhu Rong Sun Ching-ping Wong |
| author_sort | Longquan Ma |
| collection | DOAJ |
| description | With the continuous development of wearable electronics, health care and smart terminals, highly performance flexible pressure sensors present a huge application prospect. In this study, by introducing the micro-array structured electrodes and dielectric layers with high dielectric constant, capacitive pressure sensor fabricated with a brand new preparation strategy and highly sensitive is proposed. The prepared micro-array structure is the basis for sensors with high sensitivity. Besides, the contact area between the two electrodes changes from linear to planar with the increased loading, which result in a wider linear responding range. In addition, by introducing ceramic dielectric material-barium titanate (BT) fillers into the dielectric layer to increase it’s the dielectric constant, the sensitivity of the sensor shows two-fold increase. Moreover, the sensitivity gradients can be tuned by changing the loading contents of BT particles. Hence, compared with parallel board capacitive sensors with ordinary dielectric layer, these sensors exhibit excellent performance as follow, high sensitivity (up to 4.9 kPa−1) under low pressure range (0–2500 Pa), low detection limit (<1.7 Pa), short response time (<50 ms), a stable response over 5000 loading-unloading cycles, bending stability and an adjustable sensitivity. Further, the flexible pressure sensor can detect the pressure of the water droplets and monitor human movement behavior. With the facile design and excellent comprehensive properties, the flexible pressure sensor provides a new approach to improve the sensitivity and shows a broad application prospects in the wearable electronics, health care and smart terminals. Keywords: Pressure sensor, Barium titanate, Dielectric layer, Micro-array structure, Tunable sensitivity |
| first_indexed | 2024-03-12T05:51:04Z |
| format | Article |
| id | doaj.art-f5f7561974424beea1f0783cd0ac50fd |
| institution | Directory Open Access Journal |
| issn | 2352-8478 |
| language | English |
| last_indexed | 2024-03-12T05:51:04Z |
| publishDate | 2020-06-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Journal of Materiomics |
| spelling | doaj.art-f5f7561974424beea1f0783cd0ac50fd2023-09-03T05:12:34ZengElsevierJournal of Materiomics2352-84782020-06-0162321329Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrodeLongquan Ma0Xuecheng Yu1Yuanyuan Yang2Yougen Hu3Xinyu Zhang4Huayuan Li5Xing Ouyang6Pengli Zhu7Rong Sun8Ching-ping Wong9Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, China; School of Materials Science, Shenzhen University, Shenzhen, 518071, ChinaShenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, China; Shenzhen College of Advanced Technology, University of Chinese Academy of Sciences, Shenzhen, 518055, PR ChinaShenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, ChinaShenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, ChinaShenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, ChinaShenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, ChinaSchool of Materials Science, Shenzhen University, Shenzhen, 518071, ChinaShenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, China; Corresponding author.Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518005, China; Corresponding author.School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, USAWith the continuous development of wearable electronics, health care and smart terminals, highly performance flexible pressure sensors present a huge application prospect. In this study, by introducing the micro-array structured electrodes and dielectric layers with high dielectric constant, capacitive pressure sensor fabricated with a brand new preparation strategy and highly sensitive is proposed. The prepared micro-array structure is the basis for sensors with high sensitivity. Besides, the contact area between the two electrodes changes from linear to planar with the increased loading, which result in a wider linear responding range. In addition, by introducing ceramic dielectric material-barium titanate (BT) fillers into the dielectric layer to increase it’s the dielectric constant, the sensitivity of the sensor shows two-fold increase. Moreover, the sensitivity gradients can be tuned by changing the loading contents of BT particles. Hence, compared with parallel board capacitive sensors with ordinary dielectric layer, these sensors exhibit excellent performance as follow, high sensitivity (up to 4.9 kPa−1) under low pressure range (0–2500 Pa), low detection limit (<1.7 Pa), short response time (<50 ms), a stable response over 5000 loading-unloading cycles, bending stability and an adjustable sensitivity. Further, the flexible pressure sensor can detect the pressure of the water droplets and monitor human movement behavior. With the facile design and excellent comprehensive properties, the flexible pressure sensor provides a new approach to improve the sensitivity and shows a broad application prospects in the wearable electronics, health care and smart terminals. Keywords: Pressure sensor, Barium titanate, Dielectric layer, Micro-array structure, Tunable sensitivityhttp://www.sciencedirect.com/science/article/pii/S2352847819301418 |
| spellingShingle | Longquan Ma Xuecheng Yu Yuanyuan Yang Yougen Hu Xinyu Zhang Huayuan Li Xing Ouyang Pengli Zhu Rong Sun Ching-ping Wong Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode Journal of Materiomics |
| title | Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode |
| title_full | Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode |
| title_fullStr | Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode |
| title_full_unstemmed | Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode |
| title_short | Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode |
| title_sort | highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro array electrode |
| url | http://www.sciencedirect.com/science/article/pii/S2352847819301418 |
| work_keys_str_mv | AT longquanma highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT xuechengyu highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT yuanyuanyang highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT yougenhu highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT xinyuzhang highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT huayuanli highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT xingouyang highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT penglizhu highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT rongsun highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode AT chingpingwong highlysensitiveflexiblecapacitivepressuresensorwithabroadlinearresponserangeandfiniteelementanalysisofmicroarrayelectrode |