Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection
Abstract Releasing pre-strained two-dimensional nanomembranes to assemble on-chip three-dimensional devices is crucial for upcoming advanced electronic and optoelectronic applications. However, the release process is affected by many unclear factors, hindering the transition from laboratory to indus...
| Main Authors: | , , , , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2024-04-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-024-47405-2 |
| _version_ | 1797209315648471040 |
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| author | Ziyu Zhang Binmin Wu Yang Wang Tianjun Cai Mingze Ma Chunyu You Chang Liu Guobang Jiang Yuhang Hu Xing Li Xiang-Zhong Chen Enming Song Jizhai Cui Gaoshan Huang Suwit Kiravittaya Yongfeng Mei |
| author_facet | Ziyu Zhang Binmin Wu Yang Wang Tianjun Cai Mingze Ma Chunyu You Chang Liu Guobang Jiang Yuhang Hu Xing Li Xiang-Zhong Chen Enming Song Jizhai Cui Gaoshan Huang Suwit Kiravittaya Yongfeng Mei |
| author_sort | Ziyu Zhang |
| collection | DOAJ |
| description | Abstract Releasing pre-strained two-dimensional nanomembranes to assemble on-chip three-dimensional devices is crucial for upcoming advanced electronic and optoelectronic applications. However, the release process is affected by many unclear factors, hindering the transition from laboratory to industrial applications. Here, we propose a quasistatic multilevel finite element modeling to assemble three-dimensional structures from two-dimensional nanomembranes and offer verification results by various bilayer nanomembranes. Take Si/Cr nanomembrane as an example, we confirm that the three-dimensional structural formation is governed by both the minimum energy state and the geometric constraints imposed by the edges of the sacrificial layer. Large-scale, high-yield fabrication of three-dimensional structures is achieved, and two distinct three-dimensional structures are assembled from the same precursor. Six types of three-dimensional Si/Cr photodetectors are then prepared to resolve the incident angle of light with a deep neural network model, opening up possibilities for the design and manufacturing methods of More-than-Moore-era devices. |
| first_indexed | 2024-04-24T09:52:45Z |
| format | Article |
| id | doaj.art-f60efd1258674845a6df0a141b73407e |
| institution | Directory Open Access Journal |
| issn | 2041-1723 |
| language | English |
| last_indexed | 2024-04-24T09:52:45Z |
| publishDate | 2024-04-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Nature Communications |
| spelling | doaj.art-f60efd1258674845a6df0a141b73407e2024-04-14T11:20:48ZengNature PortfolioNature Communications2041-17232024-04-0115111310.1038/s41467-024-47405-2Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetectionZiyu Zhang0Binmin Wu1Yang Wang2Tianjun Cai3Mingze Ma4Chunyu You5Chang Liu6Guobang Jiang7Yuhang Hu8Xing Li9Xiang-Zhong Chen10Enming Song11Jizhai Cui12Gaoshan Huang13Suwit Kiravittaya14Yongfeng Mei15Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityShanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan UniversityShanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityDepartment of Electrical Engineering, Faculty of Engineering, Chulalongkorn UniversityDepartment of Materials Science & State Key Laboratory of Molecular Engineering of Polymer, Fudan UniversityAbstract Releasing pre-strained two-dimensional nanomembranes to assemble on-chip three-dimensional devices is crucial for upcoming advanced electronic and optoelectronic applications. However, the release process is affected by many unclear factors, hindering the transition from laboratory to industrial applications. Here, we propose a quasistatic multilevel finite element modeling to assemble three-dimensional structures from two-dimensional nanomembranes and offer verification results by various bilayer nanomembranes. Take Si/Cr nanomembrane as an example, we confirm that the three-dimensional structural formation is governed by both the minimum energy state and the geometric constraints imposed by the edges of the sacrificial layer. Large-scale, high-yield fabrication of three-dimensional structures is achieved, and two distinct three-dimensional structures are assembled from the same precursor. Six types of three-dimensional Si/Cr photodetectors are then prepared to resolve the incident angle of light with a deep neural network model, opening up possibilities for the design and manufacturing methods of More-than-Moore-era devices.https://doi.org/10.1038/s41467-024-47405-2 |
| spellingShingle | Ziyu Zhang Binmin Wu Yang Wang Tianjun Cai Mingze Ma Chunyu You Chang Liu Guobang Jiang Yuhang Hu Xing Li Xiang-Zhong Chen Enming Song Jizhai Cui Gaoshan Huang Suwit Kiravittaya Yongfeng Mei Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection Nature Communications |
| title | Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection |
| title_full | Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection |
| title_fullStr | Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection |
| title_full_unstemmed | Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection |
| title_short | Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection |
| title_sort | multilevel design and construction in nanomembrane rolling for three dimensional angle sensitive photodetection |
| url | https://doi.org/10.1038/s41467-024-47405-2 |
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