Thermo-Mechanical Fluid–Structure Interaction Numerical Modelling and Experimental Validation of MEMS Electrothermal Actuators for Aqueous Biomedical Applications

Thermo-Mechanical Fluid–Structure Interaction Numerical Modelling and Experimental Validation of MEMS Electrothermal Actuators for Aqueous Biomedical Applications

Recent developments in MEMS technologies have made such devices attractive for use in applications that involve precision engineering and scalability. In the biomedical industry, MEMS devices have gained popularity in recent years for use as single-cell manipulation and characterisation tools. A nic...

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Bibliographic Details
Main Authors: Thomas Sciberras, Marija Demicoli, Ivan Grech, Bertram Mallia, Pierluigi Mollicone, Nicholas Sammut
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Micromachines
Subjects:
numerical modelling
electrothermal actuator (ETA)
V-shaped driver
microelectromechanical system (MEMS)
fluid–structure interaction
finite element
Online Access:https://www.mdpi.com/2072-666X/14/6/1264

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