Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science
Over the years, FIB-SEM tomography has become an extremely important technique for the three-dimensional reconstruction of microscopic structures with nanometric resolution. This paper describes in detail the steps required to perform this analysis, from the experimental setup to the data analysis a...
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| Format: | Article |
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MDPI AG
2023-08-01
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| Series: | Materials |
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| Online Access: | https://www.mdpi.com/1996-1944/16/17/5808 |
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| author | Francesco Mura Flavio Cognigni Matteo Ferroni Vittorio Morandi Marco Rossi |
| author_facet | Francesco Mura Flavio Cognigni Matteo Ferroni Vittorio Morandi Marco Rossi |
| author_sort | Francesco Mura |
| collection | DOAJ |
| description | Over the years, FIB-SEM tomography has become an extremely important technique for the three-dimensional reconstruction of microscopic structures with nanometric resolution. This paper describes in detail the steps required to perform this analysis, from the experimental setup to the data analysis and final reconstruction. To demonstrate the versatility of the technique, a comprehensive list of applications is also summarized, ranging from batteries to shale rocks and even some types of soft materials. Moreover, the continuous technological development, such as the introduction of the latest models of plasma and cryo-FIB, can open the way towards the analysis with this technique of a large class of soft materials, while the introduction of new machine learning and deep learning systems will not only improve the resolution and the quality of the final data, but also expand the degree of automation and efficiency in the dataset handling. These future developments, combined with a technique that is already reliable and widely used in various fields of research, are certain to become a routine tool in electron microscopy and material characterization. |
| first_indexed | 2024-03-10T23:19:03Z |
| format | Article |
| id | doaj.art-f6702886d7d2478ba8a9b8be707f5569 |
| institution | Directory Open Access Journal |
| issn | 1996-1944 |
| language | English |
| last_indexed | 2024-03-10T23:19:03Z |
| publishDate | 2023-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Materials |
| spelling | doaj.art-f6702886d7d2478ba8a9b8be707f55692023-11-19T08:26:15ZengMDPI AGMaterials1996-19442023-08-011617580810.3390/ma16175808Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials ScienceFrancesco Mura0Flavio Cognigni1Matteo Ferroni2Vittorio Morandi3Marco Rossi4Department of Basic and Applied Sciences, University of Rome “La Sapienza”, Via Antonio Scarpa 14, 00161 Rome, ItalyDepartment of Basic and Applied Sciences, University of Rome “La Sapienza”, Via Antonio Scarpa 14, 00161 Rome, ItalyNational Research Council of Italy, Institute for Microelectronics and Microsystems, Section of Bologna, Via Piero Gobetti 101, 40129 Bologna, ItalyNational Research Council of Italy, Institute for Microelectronics and Microsystems, Section of Bologna, Via Piero Gobetti 101, 40129 Bologna, ItalyDepartment of Basic and Applied Sciences, University of Rome “La Sapienza”, Via Antonio Scarpa 14, 00161 Rome, ItalyOver the years, FIB-SEM tomography has become an extremely important technique for the three-dimensional reconstruction of microscopic structures with nanometric resolution. This paper describes in detail the steps required to perform this analysis, from the experimental setup to the data analysis and final reconstruction. To demonstrate the versatility of the technique, a comprehensive list of applications is also summarized, ranging from batteries to shale rocks and even some types of soft materials. Moreover, the continuous technological development, such as the introduction of the latest models of plasma and cryo-FIB, can open the way towards the analysis with this technique of a large class of soft materials, while the introduction of new machine learning and deep learning systems will not only improve the resolution and the quality of the final data, but also expand the degree of automation and efficiency in the dataset handling. These future developments, combined with a technique that is already reliable and widely used in various fields of research, are certain to become a routine tool in electron microscopy and material characterization.https://www.mdpi.com/1996-1944/16/17/5808FIB-SEM tomography3D reconstructionporous material systemssegmentation |
| spellingShingle | Francesco Mura Flavio Cognigni Matteo Ferroni Vittorio Morandi Marco Rossi Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science Materials FIB-SEM tomography 3D reconstruction porous material systems segmentation |
| title | Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science |
| title_full | Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science |
| title_fullStr | Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science |
| title_full_unstemmed | Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science |
| title_short | Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science |
| title_sort | advances in focused ion beam tomography for three dimensional characterization in materials science |
| topic | FIB-SEM tomography 3D reconstruction porous material systems segmentation |
| url | https://www.mdpi.com/1996-1944/16/17/5808 |
| work_keys_str_mv | AT francescomura advancesinfocusedionbeamtomographyforthreedimensionalcharacterizationinmaterialsscience AT flaviocognigni advancesinfocusedionbeamtomographyforthreedimensionalcharacterizationinmaterialsscience AT matteoferroni advancesinfocusedionbeamtomographyforthreedimensionalcharacterizationinmaterialsscience AT vittoriomorandi advancesinfocusedionbeamtomographyforthreedimensionalcharacterizationinmaterialsscience AT marcorossi advancesinfocusedionbeamtomographyforthreedimensionalcharacterizationinmaterialsscience |