Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science

Over the years, FIB-SEM tomography has become an extremely important technique for the three-dimensional reconstruction of microscopic structures with nanometric resolution. This paper describes in detail the steps required to perform this analysis, from the experimental setup to the data analysis a...

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Bibliographic Details
Main Authors: Francesco Mura, Flavio Cognigni, Matteo Ferroni, Vittorio Morandi, Marco Rossi
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/16/17/5808

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