Combination of Plasma Electrolytic Processing and Mechanical Polishing for Single-Crystal 4H-SiC
Single-crystal 4H-SiC is a typical third-generation semiconductor power-device material because of its excellent electronic and thermal properties. A novel polishing technique that combines plasma electrolytic processing and mechanical polishing (PEP-MP) was proposed in order to polish single-crysta...
Main Authors: | Gaoling Ma, Shujuan Li, Xu Liu, Xincheng Yin, Zhen Jia, Feilong Liu |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-05-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/6/606 |
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