Performance Improvement in DRAM Cell Using Novel Nitride/Metal Spacers Structure

In this paper, a novel structure of DRAM (Dynamic Random Access Memory) cell transistor which has new spacer structure of nitride/metal is investigated using 3-D technology computer-aided design simulation. When the nitride/metal spacer structure is used in a DRAM cell, the retention time increases...

תיאור מלא

מידע ביבליוגרפי
Main Authors: Seung-Geun Jung, Seong-Ji Min, Hyun-Yong Yu
פורמט: Article
שפה:English
יצא לאור: IEEE 2024-01-01
סדרה:IEEE Access
נושאים:
גישה מקוונת:https://ieeexplore.ieee.org/document/10716478/