A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor
The design of a microelectromechanical systems (MEMS) ultra-wideband (UWB) RMS power sensor is presented. The sensor incorporates a microfabricated Fe-Co-B core planar inductor and a microfabricated vibrating diaphragm variable capacitor on adhesively bonded glass wafers in a footprint area of 970 ×...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-06-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/21/11/3858 |
| _version_ | 1797531555167469568 |
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| author | Sujitha Vejella Sazzadur Chowdhury |
| author_facet | Sujitha Vejella Sazzadur Chowdhury |
| author_sort | Sujitha Vejella |
| collection | DOAJ |
| description | The design of a microelectromechanical systems (MEMS) ultra-wideband (UWB) RMS power sensor is presented. The sensor incorporates a microfabricated Fe-Co-B core planar inductor and a microfabricated vibrating diaphragm variable capacitor on adhesively bonded glass wafers in a footprint area of 970 × 970 µm<sup>2</sup> to operate in the 3.1–10.6 GHz UWB frequency range. When exposed to a far-field UWB electromagnetic radiation, the planar inductor acts as a loop antenna to generate a frequency-independent voltage across the MEMS capacitor. The voltage generates a coulombic attraction force between the diaphragm and backplate that deforms the diaphragm to change the capacitance. The frequency-independent capacitance change is sensed using a transimpedance amplifier to generate an output voltage. The sensor exhibits a linear capacitance change induced voltage relation and a calculated sensitivity of 4.5 aF/0.8 µA/m. The sensor can be used as a standalone UWB power sensor or as a 2D array for microwave-based biomedical diagnostic imaging applications or for non-contact material characterization. The device can easily be tailored for power sensing in other application areas such as, 5G, WiFi, and Internet-of-Things (IoT). The foreseen fabrication technique can rely on standard readily available microfabrication techniques. |
| first_indexed | 2024-03-10T10:46:26Z |
| format | Article |
| id | doaj.art-f83f7785ed0f4fef9b1953c3d55143fb |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T10:46:26Z |
| publishDate | 2021-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-f83f7785ed0f4fef9b1953c3d55143fb2023-11-21T22:37:25ZengMDPI AGSensors1424-82202021-06-012111385810.3390/s21113858A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm CapacitorSujitha Vejella0Sazzadur Chowdhury1Electrical and Computer Engineering Department, University of Windsor, Windsor, ON N9B 3P4, CanadaElectrical and Computer Engineering Department, University of Windsor, Windsor, ON N9B 3P4, CanadaThe design of a microelectromechanical systems (MEMS) ultra-wideband (UWB) RMS power sensor is presented. The sensor incorporates a microfabricated Fe-Co-B core planar inductor and a microfabricated vibrating diaphragm variable capacitor on adhesively bonded glass wafers in a footprint area of 970 × 970 µm<sup>2</sup> to operate in the 3.1–10.6 GHz UWB frequency range. When exposed to a far-field UWB electromagnetic radiation, the planar inductor acts as a loop antenna to generate a frequency-independent voltage across the MEMS capacitor. The voltage generates a coulombic attraction force between the diaphragm and backplate that deforms the diaphragm to change the capacitance. The frequency-independent capacitance change is sensed using a transimpedance amplifier to generate an output voltage. The sensor exhibits a linear capacitance change induced voltage relation and a calculated sensitivity of 4.5 aF/0.8 µA/m. The sensor can be used as a standalone UWB power sensor or as a 2D array for microwave-based biomedical diagnostic imaging applications or for non-contact material characterization. The device can easily be tailored for power sensing in other application areas such as, 5G, WiFi, and Internet-of-Things (IoT). The foreseen fabrication technique can rely on standard readily available microfabrication techniques.https://www.mdpi.com/1424-8220/21/11/3858MEMSUWBpower sensorplanar inductorvibrating diaphragm capacitor |
| spellingShingle | Sujitha Vejella Sazzadur Chowdhury A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor Sensors MEMS UWB power sensor planar inductor vibrating diaphragm capacitor |
| title | A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor |
| title_full | A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor |
| title_fullStr | A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor |
| title_full_unstemmed | A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor |
| title_short | A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor |
| title_sort | mems ultra wideband uwb power sensor with a fe co b core planar inductor and a vibrating diaphragm capacitor |
| topic | MEMS UWB power sensor planar inductor vibrating diaphragm capacitor |
| url | https://www.mdpi.com/1424-8220/21/11/3858 |
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