A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor

A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor

The design of a microelectromechanical systems (MEMS) ultra-wideband (UWB) RMS power sensor is presented. The sensor incorporates a microfabricated Fe-Co-B core planar inductor and a microfabricated vibrating diaphragm variable capacitor on adhesively bonded glass wafers in a footprint area of 970 ×...

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Bibliographic Details
Main Authors: Sujitha Vejella, Sazzadur Chowdhury
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Sensors
Subjects:
MEMS
UWB
power sensor
planar inductor
vibrating diaphragm capacitor
Online Access:https://www.mdpi.com/1424-8220/21/11/3858

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