A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs
This paper presents a high-accuracy complementary metal oxide semiconductor (CMOS) driven ultrasonic ranging system based on air coupled aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducers (PMUTs) using time of flight (TOF). The mode shape and the time-frequency character...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-03-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/3/284 |
| _version_ | 1797542224338092032 |
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| author | Yihsiang Chiu Chen Wang Dan Gong Nan Li Shenglin Ma Yufeng Jin |
| author_facet | Yihsiang Chiu Chen Wang Dan Gong Nan Li Shenglin Ma Yufeng Jin |
| author_sort | Yihsiang Chiu |
| collection | DOAJ |
| description | This paper presents a high-accuracy complementary metal oxide semiconductor (CMOS) driven ultrasonic ranging system based on air coupled aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducers (PMUTs) using time of flight (TOF). The mode shape and the time-frequency characteristics of PMUTs are simulated and analyzed. Two pieces of PMUTs with a frequency of 97 kHz and 96 kHz are applied. One is used to transmit and the other is used to receive ultrasonic waves. The Time to Digital Converter circuit (TDC), correlating the clock frequency with sound velocity, is utilized for range finding via TOF calculated from the system clock cycle. An application specific integrated circuit (ASIC) chip is designed and fabricated on a 0.18 μm CMOS process to acquire data from the PMUT. Compared to state of the art, the developed ranging system features a wide range and high accuracy, which allows to measure the range of 50 cm with an average error of 0.63 mm. AlN based PMUT is a promising candidate for an integrated portable ranging system. |
| first_indexed | 2024-03-10T13:27:38Z |
| format | Article |
| id | doaj.art-f87e90208d3f487092bda8c7d8131817 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T13:27:38Z |
| publishDate | 2021-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-f87e90208d3f487092bda8c7d81318172023-11-21T09:36:00ZengMDPI AGMicromachines2072-666X2021-03-0112328410.3390/mi12030284A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTsYihsiang Chiu0Chen Wang1Dan Gong2Nan Li3Shenglin Ma4Yufeng Jin5School of Electronic and Computer Engineering Bldg. A, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, ChinaSchool of Electronic and Computer Engineering Bldg. A, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, ChinaDepartment of Mechanical & Electrical Engineering, School of Aeronautics and Astronautics, Xiamen University, Xiamen 361005, ChinaSchool of Electronic and Computer Engineering Bldg. A, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, ChinaDepartment of Mechanical & Electrical Engineering, School of Aeronautics and Astronautics, Xiamen University, Xiamen 361005, ChinaSchool of Electronic and Computer Engineering Bldg. A, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, ChinaThis paper presents a high-accuracy complementary metal oxide semiconductor (CMOS) driven ultrasonic ranging system based on air coupled aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducers (PMUTs) using time of flight (TOF). The mode shape and the time-frequency characteristics of PMUTs are simulated and analyzed. Two pieces of PMUTs with a frequency of 97 kHz and 96 kHz are applied. One is used to transmit and the other is used to receive ultrasonic waves. The Time to Digital Converter circuit (TDC), correlating the clock frequency with sound velocity, is utilized for range finding via TOF calculated from the system clock cycle. An application specific integrated circuit (ASIC) chip is designed and fabricated on a 0.18 μm CMOS process to acquire data from the PMUT. Compared to state of the art, the developed ranging system features a wide range and high accuracy, which allows to measure the range of 50 cm with an average error of 0.63 mm. AlN based PMUT is a promising candidate for an integrated portable ranging system.https://www.mdpi.com/2072-666X/12/3/284aluminum nitridepiezoelectric micromachined ultrasonic transducersrangingtime of flight (TOF)time to digital converter circuit (TDC) |
| spellingShingle | Yihsiang Chiu Chen Wang Dan Gong Nan Li Shenglin Ma Yufeng Jin A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs Micromachines aluminum nitride piezoelectric micromachined ultrasonic transducers ranging time of flight (TOF) time to digital converter circuit (TDC) |
| title | A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs |
| title_full | A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs |
| title_fullStr | A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs |
| title_full_unstemmed | A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs |
| title_short | A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs |
| title_sort | novel ultrasonic tof ranging system using aln based pmuts |
| topic | aluminum nitride piezoelectric micromachined ultrasonic transducers ranging time of flight (TOF) time to digital converter circuit (TDC) |
| url | https://www.mdpi.com/2072-666X/12/3/284 |
| work_keys_str_mv | AT yihsiangchiu anovelultrasonictofrangingsystemusingalnbasedpmuts AT chenwang anovelultrasonictofrangingsystemusingalnbasedpmuts AT dangong anovelultrasonictofrangingsystemusingalnbasedpmuts AT nanli anovelultrasonictofrangingsystemusingalnbasedpmuts AT shenglinma anovelultrasonictofrangingsystemusingalnbasedpmuts AT yufengjin anovelultrasonictofrangingsystemusingalnbasedpmuts AT yihsiangchiu novelultrasonictofrangingsystemusingalnbasedpmuts AT chenwang novelultrasonictofrangingsystemusingalnbasedpmuts AT dangong novelultrasonictofrangingsystemusingalnbasedpmuts AT nanli novelultrasonictofrangingsystemusingalnbasedpmuts AT shenglinma novelultrasonictofrangingsystemusingalnbasedpmuts AT yufengjin novelultrasonictofrangingsystemusingalnbasedpmuts |