Study on Texture Formation of Sb<sub>2</sub>Te Thin Films for Phase Change Memory Applications
We investigated the texture formation of Sb<sub>2</sub>Te thin films for phase change memory applications. The Sb<sub>2</sub>Te thin films with different thicknesses were deposited on Si (100) wafers by the magnetron sputtering method. As-deposited Sb<sub>2</sub>T...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-02-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/13/3/377 |