The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties

Vanadium dioxide thin films were successfully prepared on soda lime glass substrates using the optimised conditions for r.f-inverted cylindrical magnetron sputtering. The optimised deposition parameters were fixed and then a systematic study of the effect of deposition temperature, ranging from 45...

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Main Authors: Velaphi Msomi, Oaisin Nemraoui
Format: Article
Language:English
Published: Academy of Science of South Africa 2010-11-01
Series:South African Journal of Science
Subjects:
Online Access:https://www.sajs.co.za/article/view/10102
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author Velaphi Msomi
Oaisin Nemraoui
author_facet Velaphi Msomi
Oaisin Nemraoui
author_sort Velaphi Msomi
collection DOAJ
description Vanadium dioxide thin films were successfully prepared on soda lime glass substrates using the optimised conditions for r.f-inverted cylindrical magnetron sputtering. The optimised deposition parameters were fixed and then a systematic study of the effect of deposition temperature, ranging from 450 °C to 550 °C, on the microstructure of thermochromic thin films was carried out. The deposited films were found to be well crystallised, showing strong texture corresponding to the (011) plane, indicating the presence of vanadium dioxide.
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spelling doaj.art-f946727ab543491e9a805389fce65d132022-12-21T22:56:42ZengAcademy of Science of South AfricaSouth African Journal of Science1996-74892010-11-0110611/12The influence of deposition temperature on vanadium dioxide thin films microstructure and physical propertiesVelaphi Msomi0Oaisin Nemraoui1Cape Peninsula University of TechnologyUniversity of ZululandVanadium dioxide thin films were successfully prepared on soda lime glass substrates using the optimised conditions for r.f-inverted cylindrical magnetron sputtering. The optimised deposition parameters were fixed and then a systematic study of the effect of deposition temperature, ranging from 450 °C to 550 °C, on the microstructure of thermochromic thin films was carried out. The deposited films were found to be well crystallised, showing strong texture corresponding to the (011) plane, indicating the presence of vanadium dioxide.https://www.sajs.co.za/article/view/10102deposition temperaturemicrostructurethermochromismthin filmsvanadium dioxide
spellingShingle Velaphi Msomi
Oaisin Nemraoui
The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
South African Journal of Science
deposition temperature
microstructure
thermochromism
thin films
vanadium dioxide
title The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
title_full The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
title_fullStr The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
title_full_unstemmed The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
title_short The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
title_sort influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
topic deposition temperature
microstructure
thermochromism
thin films
vanadium dioxide
url https://www.sajs.co.za/article/view/10102
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AT velaphimsomi influenceofdepositiontemperatureonvanadiumdioxidethinfilmsmicrostructureandphysicalproperties
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