Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light
The sensitivity of silicon nanopillar array for relative humidity (RH) with UV illumination was investigated in this work. The silicon nanopillar array was prepared by nanosphere lithography. Electrical measurements were performed on its sensing performance with and without UV irradiation. It was fo...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-02-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/18/2/660 |
| _version_ | 1798038282595991552 |
|---|---|
| author | Wei Li Chao Ding Yun Cai Juyan Liu Linlin Wang Qingying Ren Jie Xu |
| author_facet | Wei Li Chao Ding Yun Cai Juyan Liu Linlin Wang Qingying Ren Jie Xu |
| author_sort | Wei Li |
| collection | DOAJ |
| description | The sensitivity of silicon nanopillar array for relative humidity (RH) with UV illumination was investigated in this work. The silicon nanopillar array was prepared by nanosphere lithography. Electrical measurements were performed on its sensing performance with and without UV irradiation. It was found that UV light improved the humidity sensitivity with different UV light wavelengths and power. The sensor response and recovery time were reduced. Furthermore, the turn-on threshold voltage and the operating voltage both decreased. These sensing characteristics can mainly be attributed to the electron-hole pairs generated by UV light. These electron-hole pairs promote the adsorption and desorption processes. The results indicate that silicon nanopillar array materials with UV irradiation might be competitive as novel sensing materials for fabricating humidity sensors with high performances. |
| first_indexed | 2024-04-11T21:38:04Z |
| format | Article |
| id | doaj.art-f954f817654749ef8e2a6aae61210a45 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T21:38:04Z |
| publishDate | 2018-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-f954f817654749ef8e2a6aae61210a452022-12-22T04:01:41ZengMDPI AGSensors1424-82202018-02-0118266010.3390/s18020660s18020660Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV LightWei Li0Chao Ding1Yun Cai2Juyan Liu3Linlin Wang4Qingying Ren5Jie Xu6State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaThe sensitivity of silicon nanopillar array for relative humidity (RH) with UV illumination was investigated in this work. The silicon nanopillar array was prepared by nanosphere lithography. Electrical measurements were performed on its sensing performance with and without UV irradiation. It was found that UV light improved the humidity sensitivity with different UV light wavelengths and power. The sensor response and recovery time were reduced. Furthermore, the turn-on threshold voltage and the operating voltage both decreased. These sensing characteristics can mainly be attributed to the electron-hole pairs generated by UV light. These electron-hole pairs promote the adsorption and desorption processes. The results indicate that silicon nanopillar array materials with UV irradiation might be competitive as novel sensing materials for fabricating humidity sensors with high performances.http://www.mdpi.com/1424-8220/18/2/660silicon nanopillarhumidity sensingUV light |
| spellingShingle | Wei Li Chao Ding Yun Cai Juyan Liu Linlin Wang Qingying Ren Jie Xu Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light Sensors silicon nanopillar humidity sensing UV light |
| title | Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light |
| title_full | Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light |
| title_fullStr | Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light |
| title_full_unstemmed | Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light |
| title_short | Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light |
| title_sort | enhanced humidity sensitivity with silicon nanopillar array by uv light |
| topic | silicon nanopillar humidity sensing UV light |
| url | http://www.mdpi.com/1424-8220/18/2/660 |
| work_keys_str_mv | AT weili enhancedhumiditysensitivitywithsiliconnanopillararraybyuvlight AT chaoding enhancedhumiditysensitivitywithsiliconnanopillararraybyuvlight AT yuncai enhancedhumiditysensitivitywithsiliconnanopillararraybyuvlight AT juyanliu enhancedhumiditysensitivitywithsiliconnanopillararraybyuvlight AT linlinwang enhancedhumiditysensitivitywithsiliconnanopillararraybyuvlight AT qingyingren enhancedhumiditysensitivitywithsiliconnanopillararraybyuvlight AT jiexu enhancedhumiditysensitivitywithsiliconnanopillararraybyuvlight |