A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle
The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale, nanometer accuracy, high vacuum and non-magnet...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/11/2008 |
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| author | Junhui Zhu Siyuan Meng Yong Wang Ming Pang Zhiping Hu Changhai Ru |
| author_facet | Junhui Zhu Siyuan Meng Yong Wang Ming Pang Zhiping Hu Changhai Ru |
| author_sort | Junhui Zhu |
| collection | DOAJ |
| description | The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale, nanometer accuracy, high vacuum and non-magnetic environment compatibility, etc. In this work, a novel cross-scale nanopositioning stage was proposed, which combined the advantages of piezoelectric stick-slip positioner and piezoelectric scanner techniques and adopted the idea of macro/micro positioning. A new structure design of a single flexible hinge shared by a small and large PZT was proposed to effectively reduce the size of the positioning stage and achieve millimeter stroke and nanometer motion positioning accuracy. Then, the cross-scale motion generation mechanism of the dual piezoelectric stick-slip drive was studied, the system-level dynamics model of the proposed positioning stages was constructed, and the mechanism design was optimized. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the proposed positioning stage has a maximum motion range of 20 mm and minimum step length of 70 nm under the small piezoceramic ceramic macro-motion stepping mode, and a maximum scanning range of 4.9 μm and motion resolution of 16 nm under the large piezoceramic ceramic micro-motion scanning mode. Moreover, the proposed stage has a compact structure size of 30 × 17 × 8 mm<sup>3</sup>, with a maximum motion speed of 10 mm/s and maximum load of 2 kg. The experimental results confirm the feasibility of the proposed stage, and nanometer positioning resolution, high accuracy, high speed, and a large travel range were achieved, which demonstrates that the proposed stage has significant performance and potential for many in situ SEM nanorobotic instrument systems. |
| first_indexed | 2024-03-09T18:09:27Z |
| format | Article |
| id | doaj.art-f9565269a8354ffb81f27fcc406876a1 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T18:09:27Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-f9565269a8354ffb81f27fcc406876a12023-11-24T09:16:22ZengMDPI AGMicromachines2072-666X2022-11-011311200810.3390/mi13112008A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving PrincipleJunhui Zhu0Siyuan Meng1Yong Wang2Ming Pang3Zhiping Hu4Changhai Ru5School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, ChinaState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150000, ChinaSchool of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou 215000, ChinaCollege of Intelligent Systems Science and Engineering, Harbin Engineering University, Harbin 150001, ChinaMicro-Nano Automation Institute, JITRI, Suzhou 215100, ChinaSchool of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou 215000, ChinaThe precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale, nanometer accuracy, high vacuum and non-magnetic environment compatibility, etc. In this work, a novel cross-scale nanopositioning stage was proposed, which combined the advantages of piezoelectric stick-slip positioner and piezoelectric scanner techniques and adopted the idea of macro/micro positioning. A new structure design of a single flexible hinge shared by a small and large PZT was proposed to effectively reduce the size of the positioning stage and achieve millimeter stroke and nanometer motion positioning accuracy. Then, the cross-scale motion generation mechanism of the dual piezoelectric stick-slip drive was studied, the system-level dynamics model of the proposed positioning stages was constructed, and the mechanism design was optimized. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the proposed positioning stage has a maximum motion range of 20 mm and minimum step length of 70 nm under the small piezoceramic ceramic macro-motion stepping mode, and a maximum scanning range of 4.9 μm and motion resolution of 16 nm under the large piezoceramic ceramic micro-motion scanning mode. Moreover, the proposed stage has a compact structure size of 30 × 17 × 8 mm<sup>3</sup>, with a maximum motion speed of 10 mm/s and maximum load of 2 kg. The experimental results confirm the feasibility of the proposed stage, and nanometer positioning resolution, high accuracy, high speed, and a large travel range were achieved, which demonstrates that the proposed stage has significant performance and potential for many in situ SEM nanorobotic instrument systems.https://www.mdpi.com/2072-666X/13/11/2008nanopositioningstick-slipdual piezoelectric driveflexible hingecompact structure |
| spellingShingle | Junhui Zhu Siyuan Meng Yong Wang Ming Pang Zhiping Hu Changhai Ru A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle Micromachines nanopositioning stick-slip dual piezoelectric drive flexible hinge compact structure |
| title | A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle |
| title_full | A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle |
| title_fullStr | A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle |
| title_full_unstemmed | A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle |
| title_short | A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle |
| title_sort | novel monopolar cross scale nanopositioning stage based on dual piezoelectric stick slip driving principle |
| topic | nanopositioning stick-slip dual piezoelectric drive flexible hinge compact structure |
| url | https://www.mdpi.com/2072-666X/13/11/2008 |
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