A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle

A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle

The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale, nanometer accuracy, high vacuum and non-magnet...

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Bibliographic Details
Main Authors: Junhui Zhu, Siyuan Meng, Yong Wang, Ming Pang, Zhiping Hu, Changhai Ru
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Micromachines
Subjects:
nanopositioning
stick-slip
dual piezoelectric drive
flexible hinge
compact structure
Online Access:https://www.mdpi.com/2072-666X/13/11/2008

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