Love-Mode MEMS Devices for Sensing Applications in Liquids
Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-01-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/7/1/15 |
| _version_ | 1818163793703731200 |
|---|---|
| author | Cinzia Caliendo Smail Sait Fouad Boubenider |
| author_facet | Cinzia Caliendo Smail Sait Fouad Boubenider |
| author_sort | Cinzia Caliendo |
| collection | DOAJ |
| description | Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were calculated for different layer thicknesses, crystallographic orientations, material types and electrical boundary conditions. High velocity materials have been investigated too, enabling device miniaturization, power consumption reduction and integration with the conditioning electronic circuits. The electroacoustic coupling coefficient dispersion curves of the first four Love modes are calculated for four dispersive coupling configurations based on a c-axis tilted ZnO layer on wz-BN substrate. The gravimetric sensitivity of four Love modes travelling at a common velocity of 9318 m/s along different layer thicknesses, and of three Love modes travelling at different velocity along a fixed ZnO layer thickness, are calculated in order to design enhanced-performance sensors. The phase velocity shift and attenuation due to the presence of a viscous liquid contacting the device surface are calculated for different thicknesses of a c-axis inclined ZnO layer onto BN half-space. |
| first_indexed | 2024-12-11T16:55:13Z |
| format | Article |
| id | doaj.art-f96091e8d4fd4cd38786d9a939142490 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-11T16:55:13Z |
| publishDate | 2016-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-f96091e8d4fd4cd38786d9a9391424902022-12-22T00:57:59ZengMDPI AGMicromachines2072-666X2016-01-01711510.3390/mi7010015mi7010015Love-Mode MEMS Devices for Sensing Applications in LiquidsCinzia Caliendo0Smail Sait1Fouad Boubenider2Istituto di Acustica e Sensoristica “O.M. Corbino”, IDASC, Consiglio Nazionale delle Ricerche, CNR, Via del Fosso del Cavaliere 100, 00133 Rome, ItalyLaboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, Houari Boumedienne, B.P. 32 El Allia, Bab-Ezzouar, 16111 Algiers, AlgeriaLaboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, Houari Boumedienne, B.P. 32 El Allia, Bab-Ezzouar, 16111 Algiers, AlgeriaLove-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were calculated for different layer thicknesses, crystallographic orientations, material types and electrical boundary conditions. High velocity materials have been investigated too, enabling device miniaturization, power consumption reduction and integration with the conditioning electronic circuits. The electroacoustic coupling coefficient dispersion curves of the first four Love modes are calculated for four dispersive coupling configurations based on a c-axis tilted ZnO layer on wz-BN substrate. The gravimetric sensitivity of four Love modes travelling at a common velocity of 9318 m/s along different layer thicknesses, and of three Love modes travelling at different velocity along a fixed ZnO layer thickness, are calculated in order to design enhanced-performance sensors. The phase velocity shift and attenuation due to the presence of a viscous liquid contacting the device surface are calculated for different thicknesses of a c-axis inclined ZnO layer onto BN half-space.http://www.mdpi.com/2072-666X/7/1/15microsensorsacoustic modespiezoelectric materials |
| spellingShingle | Cinzia Caliendo Smail Sait Fouad Boubenider Love-Mode MEMS Devices for Sensing Applications in Liquids Micromachines microsensors acoustic modes piezoelectric materials |
| title | Love-Mode MEMS Devices for Sensing Applications in Liquids |
| title_full | Love-Mode MEMS Devices for Sensing Applications in Liquids |
| title_fullStr | Love-Mode MEMS Devices for Sensing Applications in Liquids |
| title_full_unstemmed | Love-Mode MEMS Devices for Sensing Applications in Liquids |
| title_short | Love-Mode MEMS Devices for Sensing Applications in Liquids |
| title_sort | love mode mems devices for sensing applications in liquids |
| topic | microsensors acoustic modes piezoelectric materials |
| url | http://www.mdpi.com/2072-666X/7/1/15 |
| work_keys_str_mv | AT cinziacaliendo lovemodememsdevicesforsensingapplicationsinliquids AT smailsait lovemodememsdevicesforsensingapplicationsinliquids AT fouadboubenider lovemodememsdevicesforsensingapplicationsinliquids |