Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures

A microstructure determines macro functionality. A controlled periodic structure gives the surface specific functions such as controlled structural color, wettability, anti-icing/frosting, friction reduction, and hardness enhancement. Currently, there are a variety of controllable periodic structure...

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Main Authors: Ri Liu, Liang Cao, Dongdong Liu, Lu Wang, Sadaf Saeed, Zuobin Wang
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/13/12/1818
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author Ri Liu
Liang Cao
Dongdong Liu
Lu Wang
Sadaf Saeed
Zuobin Wang
author_facet Ri Liu
Liang Cao
Dongdong Liu
Lu Wang
Sadaf Saeed
Zuobin Wang
author_sort Ri Liu
collection DOAJ
description A microstructure determines macro functionality. A controlled periodic structure gives the surface specific functions such as controlled structural color, wettability, anti-icing/frosting, friction reduction, and hardness enhancement. Currently, there are a variety of controllable periodic structures that can be produced. Laser interference lithography (LIL) is a technique that allows for the simple, flexible, and rapid fabrication of high-resolution periodic structures over large areas without the use of masks. Different interference conditions can produce a wide range of light fields. When an LIL system is used to expose the substrate, a variety of periodic textured structures, such as periodic nanoparticles, dot arrays, hole arrays, and stripes, can be produced. The LIL technique can be used not only on flat substrates, but also on curved or partially curved substrates, taking advantage of the large depth of focus. This paper reviews the principles of LIL and discusses how the parameters, such as spatial angle, angle of incidence, wavelength, and polarization state, affect the interference light field. Applications of LIL for functional surface fabrication, such as anti-reflection, controlled structural color, surface-enhanced Raman scattering (SERS), friction reduction, superhydrophobicity, and biocellular modulation, are also presented. Finally, we present some of the challenges and problems in LIL and its applications.
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spelling doaj.art-f987d44cf77646b38faff63ad0d8a7472023-11-18T11:53:18ZengMDPI AGNanomaterials2079-49912023-06-011312181810.3390/nano13121818Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic StructuresRi Liu0Liang Cao1Dongdong Liu2Lu Wang3Sadaf Saeed4Zuobin Wang5International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, ChinaInternational Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, ChinaInternational Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, ChinaInternational Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, ChinaInternational Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, ChinaInternational Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, ChinaA microstructure determines macro functionality. A controlled periodic structure gives the surface specific functions such as controlled structural color, wettability, anti-icing/frosting, friction reduction, and hardness enhancement. Currently, there are a variety of controllable periodic structures that can be produced. Laser interference lithography (LIL) is a technique that allows for the simple, flexible, and rapid fabrication of high-resolution periodic structures over large areas without the use of masks. Different interference conditions can produce a wide range of light fields. When an LIL system is used to expose the substrate, a variety of periodic textured structures, such as periodic nanoparticles, dot arrays, hole arrays, and stripes, can be produced. The LIL technique can be used not only on flat substrates, but also on curved or partially curved substrates, taking advantage of the large depth of focus. This paper reviews the principles of LIL and discusses how the parameters, such as spatial angle, angle of incidence, wavelength, and polarization state, affect the interference light field. Applications of LIL for functional surface fabrication, such as anti-reflection, controlled structural color, surface-enhanced Raman scattering (SERS), friction reduction, superhydrophobicity, and biocellular modulation, are also presented. Finally, we present some of the challenges and problems in LIL and its applications.https://www.mdpi.com/2079-4991/13/12/1818laser interference lithographylaser materials processingperiodic structuremicro/nanostructuringsurface functionalization
spellingShingle Ri Liu
Liang Cao
Dongdong Liu
Lu Wang
Sadaf Saeed
Zuobin Wang
Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures
Nanomaterials
laser interference lithography
laser materials processing
periodic structure
micro/nanostructuring
surface functionalization
title Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures
title_full Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures
title_fullStr Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures
title_full_unstemmed Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures
title_short Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures
title_sort laser interference lithography a method for the fabrication of controlled periodic structures
topic laser interference lithography
laser materials processing
periodic structure
micro/nanostructuring
surface functionalization
url https://www.mdpi.com/2079-4991/13/12/1818
work_keys_str_mv AT riliu laserinterferencelithographyamethodforthefabricationofcontrolledperiodicstructures
AT liangcao laserinterferencelithographyamethodforthefabricationofcontrolledperiodicstructures
AT dongdongliu laserinterferencelithographyamethodforthefabricationofcontrolledperiodicstructures
AT luwang laserinterferencelithographyamethodforthefabricationofcontrolledperiodicstructures
AT sadafsaeed laserinterferencelithographyamethodforthefabricationofcontrolledperiodicstructures
AT zuobinwang laserinterferencelithographyamethodforthefabricationofcontrolledperiodicstructures