Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition method

Germanium nanowires (GeNWs) were synthesized using chemical vapor deposition (CVD) based on vapor–liquid–solid (VLS) mechanism with Au nanoparticles as catalyst and germanium tetrachloride (GeCl4) as a precursor of germanium. Au catalysts were deposited on silicon wafer as a thin film, firstly by sp...

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Main Authors: M. Zahedifar, M. Farangi, M. H. Pakzamir
Format: Article
Language:English
Published: Nanoscience and Nanotechnology Research Center, University of Kashan 2013-03-01
Series:Journal of Nanostructures
Subjects:
Online Access:http://jns.kashanu.ac.ir/article_5447_bd3f1b03d57e1a54cc09ec33e462b5d9.pdf
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author M. Zahedifar
M. Farangi
M. H. Pakzamir
author_facet M. Zahedifar
M. Farangi
M. H. Pakzamir
author_sort M. Zahedifar
collection DOAJ
description Germanium nanowires (GeNWs) were synthesized using chemical vapor deposition (CVD) based on vapor–liquid–solid (VLS) mechanism with Au nanoparticles as catalyst and germanium tetrachloride (GeCl4) as a precursor of germanium. Au catalysts were deposited on silicon wafer as a thin film, firstly by sputtering technique and secondly by submerging the silicon substrates in Au colloidal solution, which resulted in Au nanoparticles with different sizes. GeNWs were synthesized at 400 °C, which is a low temperature for electrical device fabrication. Effect of different parameters such as Au nanoparticles size, carrier gas (Ar) flow and mixture of H2 with the carrier gas on GeNWs diameter and shape was studied by SEM images. The chemical composition of the nanostructure was also examined by energy dispersive X-ray spectroscopy (EDS).
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spelling doaj.art-fa3c80f435534e98a5a39696c5f81a242022-12-21T19:03:23ZengNanoscience and Nanotechnology Research Center, University of KashanJournal of Nanostructures2251-78712251-788X2013-03-013110310810.7508/jns.2013.01.0125447Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition methodM. Zahedifar0M. Farangi1M. H. Pakzamir2Institute of Nano Science and Nano Technology, University of Kashan, Kashan, P. O. Box. 87317–51167, IranInstitute of Nano Science and Nano Technology, University of Kashan, Kashan, P. O. Box. 87317–51167, IranInstitute of Nano Science and Nano Technology, University of Kashan, Kashan, P. O. Box. 87317–51167, IranGermanium nanowires (GeNWs) were synthesized using chemical vapor deposition (CVD) based on vapor–liquid–solid (VLS) mechanism with Au nanoparticles as catalyst and germanium tetrachloride (GeCl4) as a precursor of germanium. Au catalysts were deposited on silicon wafer as a thin film, firstly by sputtering technique and secondly by submerging the silicon substrates in Au colloidal solution, which resulted in Au nanoparticles with different sizes. GeNWs were synthesized at 400 °C, which is a low temperature for electrical device fabrication. Effect of different parameters such as Au nanoparticles size, carrier gas (Ar) flow and mixture of H2 with the carrier gas on GeNWs diameter and shape was studied by SEM images. The chemical composition of the nanostructure was also examined by energy dispersive X-ray spectroscopy (EDS).http://jns.kashanu.ac.ir/article_5447_bd3f1b03d57e1a54cc09ec33e462b5d9.pdfGermanium nanowiresCVD methodAu catalystCarrier gas composition
spellingShingle M. Zahedifar
M. Farangi
M. H. Pakzamir
Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition method
Journal of Nanostructures
Germanium nanowires
CVD method
Au catalyst
Carrier gas composition
title Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition method
title_full Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition method
title_fullStr Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition method
title_full_unstemmed Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition method
title_short Gold catalytic Growth of Germanium Nanowires by chemical vapour deposition method
title_sort gold catalytic growth of germanium nanowires by chemical vapour deposition method
topic Germanium nanowires
CVD method
Au catalyst
Carrier gas composition
url http://jns.kashanu.ac.ir/article_5447_bd3f1b03d57e1a54cc09ec33e462b5d9.pdf
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AT mfarangi goldcatalyticgrowthofgermaniumnanowiresbychemicalvapourdepositionmethod
AT mhpakzamir goldcatalyticgrowthofgermaniumnanowiresbychemicalvapourdepositionmethod