Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure,...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/8/1321 |
| _version_ | 1797431932816982016 |
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| author | Chen Li Chi Zhang Lijun Yang Fangtong Guo |
| author_facet | Chen Li Chi Zhang Lijun Yang Fangtong Guo |
| author_sort | Chen Li |
| collection | DOAJ |
| description | At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × 10<sup>−3</sup> W/kPa and the linearity was 5.9 × 10<sup>−3</sup>. The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field. |
| first_indexed | 2024-03-09T09:52:27Z |
| format | Article |
| id | doaj.art-fa58f8b587014aa48ccfa8940c1f6987 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T09:52:27Z |
| publishDate | 2022-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-fa58f8b587014aa48ccfa8940c1f69872023-12-02T00:01:52ZengMDPI AGMicromachines2072-666X2022-08-01138132110.3390/mi13081321Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder InterferometerChen Li0Chi Zhang1Lijun Yang2Fangtong Guo3School of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi’an 710021, ChinaSchool of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi’an 710021, ChinaSchool of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi’an 710021, ChinaPeking University Founder Technology College, Beijing 065000, ChinaAt present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × 10<sup>−3</sup> W/kPa and the linearity was 5.9 × 10<sup>−3</sup>. The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field.https://www.mdpi.com/2072-666X/13/8/1321silicon on insulatorpressure sensorMach–Zehnder interferometerdirectional couplerridge waveguide |
| spellingShingle | Chen Li Chi Zhang Lijun Yang Fangtong Guo Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer Micromachines silicon on insulator pressure sensor Mach–Zehnder interferometer directional coupler ridge waveguide |
| title | Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer |
| title_full | Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer |
| title_fullStr | Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer |
| title_full_unstemmed | Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer |
| title_short | Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer |
| title_sort | silicon on insulator optical waveguide pressure sensor based on mach zehnder interferometer |
| topic | silicon on insulator pressure sensor Mach–Zehnder interferometer directional coupler ridge waveguide |
| url | https://www.mdpi.com/2072-666X/13/8/1321 |
| work_keys_str_mv | AT chenli silicononinsulatoropticalwaveguidepressuresensorbasedonmachzehnderinterferometer AT chizhang silicononinsulatoropticalwaveguidepressuresensorbasedonmachzehnderinterferometer AT lijunyang silicononinsulatoropticalwaveguidepressuresensorbasedonmachzehnderinterferometer AT fangtongguo silicononinsulatoropticalwaveguidepressuresensorbasedonmachzehnderinterferometer |