Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel
To improve the chemical mechanical polishing (CMP) performance of 316L stainless steel, the effect and its mechanism of complexing agent types on the CMP process of 316L stainless steel were studied. The influence of complexing agent types, including glycine, oxalic acid and citric acid, and their c...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | zho |
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Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2022-12-01
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| Series: | Jin'gangshi yu moliao moju gongcheng |
| Subjects: | |
| Online Access: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0047 |
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| author | Guomei CHEN Chunkuan DU Zifeng NI Da BIAN Hao WANG Ping ZHANG Xin ZHANG |
| author_facet | Guomei CHEN Chunkuan DU Zifeng NI Da BIAN Hao WANG Ping ZHANG Xin ZHANG |
| author_sort | Guomei CHEN |
| collection | DOAJ |
| description | To improve the chemical mechanical polishing (CMP) performance of 316L stainless steel, the effect and its mechanism of complexing agent types on the CMP process of 316L stainless steel were studied. The influence of complexing agent types, including glycine, oxalic acid and citric acid, and their concentrations on polishing performance of 316L stainless steel were investigated with material removal rate (MRR) and surface roughness Ra as indexes. Electrochemical workstation, contact angle measuring instrument and X-ray photoelectron spectroscopy (XPS) were performed to analyze the affecting mechanism of complexing agents on 316L stainless steel CMP processing. The results indicated that only when the mass fraction of glycine was 0.2%, both higher MRR of 210 nm/min and lower Ra of 1.613 nm could be obtained. The inhibition effect of complexing agent with high concentration on 316L stainless steel MRR was because the complexing agent enhanced the corrosion resistance and reduced the oxidation rate of 316L stainless steel surface. The XPS results showed that part of glycine complex would be attached on the surface of 316L stainless steel to produce corrosion inhibition. |
| first_indexed | 2024-03-11T12:27:14Z |
| format | Article |
| id | doaj.art-fa5a041efcc04f05ab7d1405f7e531c5 |
| institution | Directory Open Access Journal |
| issn | 1006-852X |
| language | zho |
| last_indexed | 2024-03-11T12:27:14Z |
| publishDate | 2022-12-01 |
| publisher | Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. |
| record_format | Article |
| series | Jin'gangshi yu moliao moju gongcheng |
| spelling | doaj.art-fa5a041efcc04f05ab7d1405f7e531c52023-11-06T08:41:01ZzhoZhengzhou Research Institute for Abrasives & Grinding Co., Ltd.Jin'gangshi yu moliao moju gongcheng1006-852X2022-12-0142675375910.13394/j.cnki.jgszz.2022.00472022-0047Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steelGuomei CHEN0Chunkuan DU1Zifeng NI2Da BIAN3Hao WANG4Ping ZHANG5Xin ZHANG6School of Intelligent Equipment and Automotive Engineering, Wuxi Vocational Institute of Commerce, Wuxi 214153, Jiangsu, ChinaSchool of Intelligent Equipment and Automotive Engineering, Wuxi Vocational Institute of Commerce, Wuxi 214153, Jiangsu, ChinaSchool of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, ChinaSchool of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, ChinaSchool of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, ChinaSchool of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, ChinaSchool of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, ChinaTo improve the chemical mechanical polishing (CMP) performance of 316L stainless steel, the effect and its mechanism of complexing agent types on the CMP process of 316L stainless steel were studied. The influence of complexing agent types, including glycine, oxalic acid and citric acid, and their concentrations on polishing performance of 316L stainless steel were investigated with material removal rate (MRR) and surface roughness Ra as indexes. Electrochemical workstation, contact angle measuring instrument and X-ray photoelectron spectroscopy (XPS) were performed to analyze the affecting mechanism of complexing agents on 316L stainless steel CMP processing. The results indicated that only when the mass fraction of glycine was 0.2%, both higher MRR of 210 nm/min and lower Ra of 1.613 nm could be obtained. The inhibition effect of complexing agent with high concentration on 316L stainless steel MRR was because the complexing agent enhanced the corrosion resistance and reduced the oxidation rate of 316L stainless steel surface. The XPS results showed that part of glycine complex would be attached on the surface of 316L stainless steel to produce corrosion inhibition.http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0047chemical mechanical polishing316l stainless steelcomplexing agentelectrochemistryfenton reaction |
| spellingShingle | Guomei CHEN Chunkuan DU Zifeng NI Da BIAN Hao WANG Ping ZHANG Xin ZHANG Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel Jin'gangshi yu moliao moju gongcheng chemical mechanical polishing 316l stainless steel complexing agent electrochemistry fenton reaction |
| title | Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel |
| title_full | Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel |
| title_fullStr | Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel |
| title_full_unstemmed | Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel |
| title_short | Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel |
| title_sort | effect of complexing agent on chemical mechanical polishing effect of 316l stainless steel |
| topic | chemical mechanical polishing 316l stainless steel complexing agent electrochemistry fenton reaction |
| url | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0047 |
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