Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel

Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel

To improve the chemical mechanical polishing (CMP) performance of 316L stainless steel, the effect and its mechanism of complexing agent types on the CMP process of 316L stainless steel were studied. The influence of complexing agent types, including glycine, oxalic acid and citric acid, and their c...

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Bibliographic Details
Main Authors: Guomei CHEN, Chunkuan DU, Zifeng NI, Da BIAN, Hao WANG, Ping ZHANG, Xin ZHANG
Format: Article
Language:zho
Published: Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2022-12-01
Series:Jin'gangshi yu moliao moju gongcheng
Subjects:
chemical mechanical polishing
316l stainless steel
complexing agent
electrochemistry
fenton reaction
Online Access:http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0047

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