MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSE

The article deals with theoreticalmodeling results of the combined influence of nonlinear absorptivity and absorption coefficient on the spatial and temporal distribution of the electron-hole plasma and the dynamics of the specific absorption flux in silicon under femtosecond laser pulse. It is show...

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Main Authors: I. V. Guk, G. D. Shandybina, Y. B. Yakovlev
Format: Article
Language:English
Published: Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University) 2013-05-01
Series:Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
Subjects:
Online Access:http://ntv.ifmo.ru/file/article/4204.pdf
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author I. V. Guk,
G. D. Shandybina
Y. B. Yakovlev
author_facet I. V. Guk,
G. D. Shandybina
Y. B. Yakovlev
author_sort I. V. Guk,
collection DOAJ
description The article deals with theoreticalmodeling results of the combined influence of nonlinear absorptivity and absorption coefficient on the spatial and temporal distribution of the electron-hole plasma and the dynamics of the specific absorption flux in silicon under femtosecond laser pulse. It is shown thatincreased absorption of the hot electron gas makes the main contribution to the change in specific absorption flux. Obtained results were compared with the known views about the polariton mechanism,which is usedfor the interpretation of femtosecond laser silicon microstructuring. There aredemonstratedThe need to consider absorption capacity dynamics in the regimes assessment of ultra short laser semiconductor processing.
first_indexed 2024-12-24T10:59:32Z
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institution Directory Open Access Journal
issn 2226-1494
2500-0373
language English
last_indexed 2024-12-24T10:59:32Z
publishDate 2013-05-01
publisher Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)
record_format Article
series Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
spelling doaj.art-fa9fbaa90d10432fa626d60ad23ab77a2022-12-21T16:58:45ZengSaint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki2226-14942500-03732013-05-01133133137MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSEI. V. Guk, G. D. ShandybinaY. B. YakovlevThe article deals with theoreticalmodeling results of the combined influence of nonlinear absorptivity and absorption coefficient on the spatial and temporal distribution of the electron-hole plasma and the dynamics of the specific absorption flux in silicon under femtosecond laser pulse. It is shown thatincreased absorption of the hot electron gas makes the main contribution to the change in specific absorption flux. Obtained results were compared with the known views about the polariton mechanism,which is usedfor the interpretation of femtosecond laser silicon microstructuring. There aredemonstratedThe need to consider absorption capacity dynamics in the regimes assessment of ultra short laser semiconductor processing.http://ntv.ifmo.ru/file/article/4204.pdfabsorptivityskin-effectelectron-hole plasmafemtosecond surface microstructuring
spellingShingle I. V. Guk,
G. D. Shandybina
Y. B. Yakovlev
MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSE
Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
absorptivity
skin-effect
electron-hole plasma
femtosecond surface microstructuring
title MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSE
title_full MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSE
title_fullStr MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSE
title_full_unstemmed MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSE
title_short MODIFICATION OF SILICON ABSORPTIVITY UNDER FEMTOSECOND LASER PULSE
title_sort modification of silicon absorptivity under femtosecond laser pulse
topic absorptivity
skin-effect
electron-hole plasma
femtosecond surface microstructuring
url http://ntv.ifmo.ru/file/article/4204.pdf
work_keys_str_mv AT ivguk modificationofsiliconabsorptivityunderfemtosecondlaserpulse
AT gdshandybina modificationofsiliconabsorptivityunderfemtosecondlaserpulse
AT ybyakovlev modificationofsiliconabsorptivityunderfemtosecondlaserpulse