Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films
Ultrasound is widely applied in diverse domains, such as medical imaging, non-destructive evaluation, and acoustic communication. Piezoelectric micromachined ultrasonic transducers (PMUTs) capable of generating and receiving ultrasonic signals at the micrometer level have become a prominent technolo...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/8/1001 |